Method for the calibration of a Wire Bonder
AssigneeESEC Trading SA
InventorsMichael Mayer, Martin Melzer
Life of this patent
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AssigneeESEC Trading SA
InventorsMichael Mayer, Martin Melzer
Estimating the term…
In order that, on wire bonding by means of a Wire Bonder, optimum bonding results can be achieved after a capillary change it is suggested that, after a change from a first capillary to a second capillary, the ultrasonic transducer which applies ultrasonics to the horn which guides the capillary is controlled with a parameter P2 which results from the parameter P1 before the capillary change as P2=g(k1, k2)*P1 or P2=g(k1, k2, A1, A2)*P1 or P2=g(k1, k2, A1, A2, H1, H2)*P1, whereby the quantities k1 and k2 designate the estimated values for the flexural strength, the quantities A1 and A2 the amplitudes of the freely oscillating capillary and H1 and H2 the diameters in the narrowest part of the longitudinal drill hole of the first or second capillary and whereby the function g is a predetermined function.
Method for the calibration of a Wire Bonder after a change from a first capillary to a second capillary, whereby the first or second capillary is clamped onto the tip of a horn to which ultrasonics can be applied from an ultrasonic transducer, whereby on operation with the first capillary the ultrasonic transducer is controlled with a value P1 of a parameter P and whereby on operation with the second capillary the ultrasonic transducer is controlled with a value P2 of the parameter P, wherein an estimated value k1 is determined for the flexural strength of the first capillary and an estimated value k2 is determined for the flexural strength of the second capillary, and wherein the value P2 is set to P2=g(k1, k2)*P1, whereby g(k1, k2) is a predetermined function of the two estimated values k1 and k2.
Method for the calibration of a Wire Bonder after a change from a first capillary to a second capillary, whereby the first or second capillary is clamped onto the tip of a horn to which ultrasonics can be applied from an ultrasonic transducer, whereby on operation with the first capillary the ultrasonic transducer is controlled with a value P1 of a parameter P and whereby on operation with the second capillary the ultrasonic transducer is controlled with a value P2 of the parameter P, wherein an estimated value k1 is determined for the flexural strength of the first capillary and an estimated value k2 is determined for the flexural strength of the second capillary, wherein the amplitude A1 of the oscillations of the tip of the first capillary is determined when a predetermined value P0 of the parameter P is applied to the ultrasonic transducer, wherein the amplitude A2 of the oscillations of the tip of the second capillary is determined when the predetermined value P0 of the parameter P is applied to the ultrasonic transducer, and wherein the value P2 is set to P2=g(k1, k2, A1, A2)*P1, whereby g(k1, k2, A1, A2) is a predetermined function of the two estimated values k1 and k2 and the measured amplitudes A1 and A2.
Method for the calibration of a Wire Bonder after a change from a first capillary to a second capillary, whereby the first or second capillary is clamped onto the tip of a horn to which ultrasonics can be applied from an ultrasonic transducer, whereby on operation with the first capillary the ultrasonic transducer is controlled with a value P1 of a parameter P and whereby on operation with the second capillary the ultrasonic transducer is controlled with a value P2 of the parameter P, and whereby the first and second capillary have a longitudinal drill hole the side of which facing towards the outlet has a constant diameter H1 or H2 over a certain distance, wherein an estimated value k1 is determined for the flexural strength of the first capillary and an estimated value k2 is determined for the flexural strength of the second capillary, wherein the amplitude A1 of the oscillations of the tip of the first capillary is determined when a predetermined value P0 of the parameter P is applied to the ultrasonic transducer, wherein the amplitude A2 of the oscillations of the tip of the second capillary is determined when the predetermined value P0 of the parameter P is applied to the ultrasonic transducer, wherein a diameter H1 of the first capillary and a diameter H2 of the second capillary are measured, and wherein the value P2 is set to P2=g(k1, k2, A1, A2, H1, H2)*P1, whereby g(k1, k2, A1, A2, H1, H2) is a predetermined function of the two estimated values k1 and k2, the measured amplitudes A1 and A2 and the measured diameters H1 and H2.
Dependencies are inferred from the claim text.