Magnetoresistive effect thin-film magnetic head and manufacturing method of magnetoresistive effect thin-film magnetic head
AssigneeTDK Corporation
InventorsKatsuya Kanakubo, Yoshimitsu Wada, Kazuhiro Hattori
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Abstract
A manufacturing method of an MR thin-film magnetic head with an MR film and lead conductors overlapping each other, includes a step of depositing a conductor layer on at least the magnetoresistive effect film, a step of forming a cap layer patterned on the deposited conductor layer, and a step of dry-etching the deposited conductor layer through a mask of the patterned cap layer using an Ar gas and an O2 gas, an O2 gas or a N2 gas so as to pattern the deposited conductor film to form the lead conductors.
Claims32
A manufacturing method of a magnetoresistive effect thin-film magnetic head with a magnetoresistive effect film and lead conductors overlapping each other, comprising the steps of:
- depositing a conductor layer on at least said magnetoresistive effect film;
- forming a cap layer patterned on the deposited conductor layer;
- and
- dry-etching the deposited conductor layer through a mask of the patterned cap layer using an argon gas and an oxygen gas so as to pattern the deposited conductor film to form the lead conductors.
A manufacturing method of a magnetoresistive effect thin-film magnetic head with a magnetoresistive effect film and lead conductors overlapping each other, comprising the steps of:
- depositing a conductor layer on at least said magnetoresistive effect film;
- forming a cap layer patterned on the deposited conductor layer;
- and
- dry-etching the deposited conductor layer through a mask of the patterned cap layer using an oxygen gas so as to pattern the deposited conductor film to form the lead conductors.
A manufacturing method of a magnetoresistive effect thin-film magnetic head with a magnetoresistive effect film and lead conductors overlapping each other, comprising the steps of:
- depositing a conductor layer on at least said magnetoresistive effect film;
- forming a cap layer patterned on the deposited conductor layer;
- and
- dry-etching the deposited conductor layer through a mask of the patterned cap layer using a nitrogen gas so as to pattern the deposited conductor film to form the lead conductors.
A magnetoresistive effect thin-film magnetic head comprising:
- a magnetoresistive effect film;
- lead conductors formed to overlap said magnetoresistive effect film and made of a gold or a gold alloy;
- and
- a patterned cap layer formed on said lead conductors and made of a tantalum, a tantalum alloy, a titanium, a titanium alloy, or a nitride of a tantalum, a tantalum alloy, a titanium or a titanium alloy.
Dependencies are inferred from the claim text.