Production method for spin valve film and production method of magnetoresistance effect type magnetic head
AssigneeSony Corporation
InventorEiji Makino
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Abstract
In the present invention, some layers, the last of which is the Cu film serving as the nonmagnetic layer, are formed on the substrate by means of sputtering performed at a reduced pressure in a film-forming sputtering chamber. The substrate is then exposed in a gas atmosphere in a gas-exposure chamber filled with gas that activates a surface of the Cu film. The remaining layers of the spin valve film are formed on the substrate, in the film-forming sputtering chamber.
Claims14
A method of manufacturing a spin valve film comprising an anti-ferromagnetic layer, a magnetization-fixed layer magnetized in a prescribed direction by an exchange coupling magnetic field acting between it and the anti-ferromagnetic layer, a magnetization-free layer having a magnetization direction in accordance with an external magnetic field, and a nonmagnetic layer made of a Cu film magnetically isolating the magnetization-fixed layer and the magnetization-free layer, which are laid one upon another on at least a substrate, said method comprising:
- forming some layers, the last of which is the Cu film serving as the nonmagnetic layer, on the substrate by means of sputtering performed at a reduced pressure in a film-forming sputtering chamber;
- exposing the substrate in a gas atmosphere in a gas-exposure chamber filled with gas that activates a surface of the Cu film;
- and
- forming the remaining layers of the spin valve film, on the substrate, in the film-forming sputtering chamber.
A method of manufacturing a magnetoresistance-effect magnetic head comprising a spin valve film as a magnetism-sensitive element for detecting magnetic signals emanating from magnetic recording media, said spin valve film comprising an anti-ferromagnetic layer, a magnetization-fixed layer magnetized in a prescribed direction by an exchange coupling magnetic field acting between it and the anti-ferromagnetic layer, a magnetization-free layer having a magnetization direction in accordance with an external magnetic field, and a nonmagnetic layer made of a Cu film magnetically isolating the magnetization-fixed layer and the magnetization-free layer, which are laid one upon another on at least a substrate, said method comprising forming the spin valve film by:
- forming some layers, the last of which is the Cu film serving as the nonmagnetic layer, on the substrate by means of sputtering performed at a reduced pressure in a film-forming sputtering chamber;
- exposing the substrate in a gas atmosphere in a gas-exposure chamber filled with gas that activates a surface of the Cu film;
- and
- forming the remaining layers of the spin valve film, on the substrate, in the film-forming sputtering chamber.
Dependencies are inferred from the claim text.