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US 2003/0145951 A1Published application
Apparatus including chuck and matching box
AssigneeJusung Engineering Co., Ltd.
InventorChang-Yeop Jeon
Life of this patent
Estimating the term…
Abstract
An apparatus of fabricating a semiconductor device includes: a chamber; a radio frequency (RF) power supply supplying an RF power for the chamber; a matching box including a matching unit adjusting an impedance of the RF power; and a chuck penetrating a surface of the chamber, the chuck including a fixing means to fix the matching box to the chuck.
Claims15
An apparatus of fabricating a semiconductor device, comprising:
- a chamber;
- a radio frequency (RF) power supply supplying an RF power for the chamber;
- a matching box including a matching unit adjusting an impedance of the RF power;
- and
- a chuck penetrating a surface of the chamber, the chuck including a fixing means to fix the matching box to the chuck.
2 more elements
Dependencies are inferred from the claim text.