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US 2003/0145674 A1Published application
Robot
AssigneeApplied Materials, Inc.
InventorWilliam T. Weaver
Life of this patent
Estimating the term…
Abstract
The robot includes a substantially vertical linear track and a bearing configured to translate along the linear track. Also included is an elongate arm having opposing first and second ends. The elongate arm is rotatably coupled to the bearing near the first end. A platform, configured to receive a wafer handling robot, is rotatably coupled to the elongate arm near the second end of the elongate arm. A linear drive, configured to translate the bearing along the linear track, is coupled to the bearing.
Claims13
A robot comprising:
- a substantially vertical linear track;
- a bearing configured to translate along said linear track;
- an elongate arm having opposing first and second ends, where said elongate arm is rotatably coupled to said bearing near said first end;
- and
- a platform rotatably coupled to said elongate arm near said second end, where said platform is configured to receive a wafer handling robot.
2 more elements
Dependencies are inferred from the claim text.