Pressure sensor with a radially tensioned metal diaphragm

A pressure sensor for measuring fluid pressure, said pressure sensor including:

• a first body member;
• a second body member;
• and
• a radially tensioned flexible diaphragm disposed between said first body member and said second body member, said first body member and said diaphragm forming a first fluid chamber, said second body member and said diaphragm forming a second fluid chamber;
• said first body member and said second body member being formed from a ferromagnetic material such that said first and second body members shield said diaphragm from magnetic fields which may otherwise cause movement of said diaphragm resulting in an inaccurate measurement of the fluid pressure applied to said diaphragm.

A method of forming a pressure sensor comprising the steps of:

• providing a first body member and a second body member;
• preheat-treating said first body member and said second body member;
• disposing a flexible diaphragm formed from an annealed precipitation hardening material between said first and second body members;
• attaching said body members to said diaphragm such that a first fluid chamber is formed between said first body member and said diaphragm and a second fluid chamber is formed between said second body member and said diaphragm;
• and
• heat treating said first and second body members and said diaphragm to tension said diaphragm.