US 2003/0145463 A1 · Ink jet recording head

Abstract

This ink jet recording head manufacturing method comprises (A) a process for forming a peeling layer 11 wherein peeling is induced by light irradiation, on a base plate 10 exhibiting light-transmissivity, (B) a process for forming a common electrode film 3 on the peeling layer 11, (C) a process for forming a plurality of piezoelectric elements 4, (D) a process for forming a reservoir piece 5 comprising a lid structure that accommodates in its interior one or more piezoelectric elements 4, which interior forms an ink reservoir 51, (E) a process for irradiating the peeling layer 11 with prescribed light from the base plate 10 side thereof, thereby producing peeling in the peeling layer 11, and peeling the base plate 10 away, and (F) a process for bonding a pressure chamber plate 2, whereon are provided a plurality of pressure chambers 21, to the common electrode film 3 separated from the base plate, so that the pressure chambers 21 are sealed. Heads compatible with high resolution can thus be manufactured because thin pressure chamber plates can be fabricated in a separate process from the piezoelectric element formation process and then, last of all, bonded in place.

Claims16

Dependent claims

An ink jet recording head configured so that ink can be discharged from nozzles provided in pressure chambers by applying voltage to piezoelectric elements to induce volumetric changes therein, comprising:

a pressure chamber plate whereon are formed pressure chambers having nozzles that can discharge ink, such that said nozzles open in same direction;
a common electrode film formed, so as to seal said pressure chambers, on a surface of said pressure chamber plate different from surface whereon said nozzles are provided;
piezoelectric elements comprising piezoelectric thin films and upper electrodes, formed severally in positions corresponding to said pressure chambers on said common electrode film;
and
a reservoir piece provided with a lid-shaped structure that accommodates in the interior thereof one or more of said piezoelectric elements, said interior forming a reservoir.

2 more elements

A manufacturing method for an ink jet recording head configured so that ink can be discharged from nozzles provided in pressure chambers by applying voltage to piezoelectric elements to induce volumetric changes therein, comprising:

a peeling layer formation process for forming a peeling layer for producing peeling by irradiation of light onto a base plate exhibiting light-transmissivity;
a common electrode layer formation process for forming a common electrode film on said peeling film;
a piezoelectric element formation process for forming a plurality of piezoelectric elements on said common electrode film;
a reservoir formation process for forming a reservoir piece provided with a lid-shaped structure that accommodates in the interior thereof one or more of said piezoelectric elements, said interior forming a reservoir;
a peeling process for causing peeling in said peeling layer by irradiating said peeling layer from base plate side thereof with prescribed light, thereby peeling away said base plate;
and
a bonding process for bonding a pressure chamber plate provided with said plurality of pressure chambers onto said common electrode film from which said base plate has been peeled, so as to seal said pressure chambers.

4 more elements

a peeling layer formation process for forming a peeling layer for producing peeling by irradiation of light onto a first base plate exhibiting light-transmissivity;
a common electrode layer formation process for forming a common electrode film on said peeling film;
a piezoelectric element formation process for forming a plurality of piezoelectric elements on said common electrode film;
an adhesive joining process for adhesively joining a second base plate, through an adhesive layer, to surface whereon said piezoelectric elements are formed;
a first peeling process for causing peeling in said peeling layer by irradiating said peeling layer from first base plate side thereof with prescribed light, thereby peeling away said first base plate;
a bonding process for bonding a pressure chamber plate provided with said plurality of pressure chambers onto said common electrode film from which said first base plate has been peeled, so as to seal said pressure chambers;
and
a second peeling process for peeling away said second base plate.

5 more elements

Dependencies are inferred from the claim text.

Ink jet recording head

Life of this patent

Ink jet recording head

Life of this patent

Abstract

Claims16