Pressurizing method and pressurizing apparatus

A pressurizing apparatus for pressurizing a second component onto

• a first component, comprising:
• a stage on which the first component is arranged;
• a tool disposed so as to face the stage;
• a tool driving section for moving the tool between a first position at which the tool faces the first and second components with space and a second position at which the tool is biased toward the stage to pressurize the second component against the first component;
• a protection sheet storage section for storing a protection sheet so as to be able to feed the protection sheet,
• a protection sheet recovery section for recovering the protection sheet,
• a protection sheet guide section for guiding the protection sheet from the protection sheet storage section to the protection sheet recovery section through the lower side of the tool, and
• a protection sheet feeding section for feeding the protection sheet to the protection sheet recovery section along the protection sheet guide section.

A pressurizing method for pressurizing a bonding sheet against a plate-like component, comprising:

• supplying the bonding sheet so that a bonding layer of the bonding sheet faces the plate-like component;
• cutting the bonding layer of the bonding sheet to form a slit;
• heating the bonding layer divided by the slit with pressurizing against the plate-like component by the tool;
• cooling the portion of the bonding layer of the bonding sheet adhering to the plate-like component by the bonding force of the bonding layer during or after the pressurizing and heating or thereafter;
• and
• stripping the base layer from the plate-like component.

A pressurizing apparatus for pressurizing a bonding sheet against a

• plate-like component, comprising:
• a stage on which the plate-like component is arranged;
• a tool disposed so as to face the stage;
• a tool driving section for moving the tool between a first position at which the tool faces the plate-like component and the bonding sheet with space and a second position at which the tool is biased toward the stage to pressurize the bonding sheet against the plate-like component;
• a bonding sheet storage section for storing the bonding sheet so as to be able to feed the bonding sheet;
• a bonding sheet recovery section for recovering the bonding sheet;
• a bonding sheet guide section for guiding the bonding sheet from the bonding sheet storage section to the bonding sheet recovery section through the lower side of the tool;
• a bonding sheet feeding section for feeding the bonding sheet to the bonding sheet recovery section along the bonding sheet guide section;
• and a bonding sheet cooling section for cooling the bonding sheet.