Production control system and production controlling method
AssigneeMitsubishi Denki Kabushiki Kaisha
InventorShinji Watanabe
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AssigneeMitsubishi Denki Kabushiki Kaisha
InventorShinji Watanabe
Estimating the term…
Data on manufacturing processes in a semiconductor manufacturing apparatus mainly containing bar code data are input to a portable input unit in step S1. A main bar code label can be affixed to an extremely short bar-code-labeled component such as a reticle having only a very narrow bar-code to-be-labeled region, which enables data input by bar codes. The portable input unit is placed in a terminal in step S2, so that data input to the portable input unit are transferred to a production line terminal. The production line terminal performs a compiling process (production controlling process) in step S3 based on input data obtained from the portable input unit and master data obtained from a server. Consequently obtained are a production control system and a production controlling method capable of performing production control with high accuracy in which errors created by operators in data input are minimized.
A production control system in manufacturing processes in a semiconductor manufacturing apparatus including a bar-code-labeled component provided with a bar code defining identification information, said bar-code-labeled component including an extremely short bar-code-labeled component having a bar code label affixed thereto, said bar code label being printed with a bar code of not more than 3 mm in height, comprising:
A production controlling method in manufacturing processes in a semiconductor manufacturing apparatus including a bar-code-labeled component provided with a bar code defining identification information, said bar-code-labeled component including an extremely short bar-code-labeled component having a bar code label affixed thereto, said bar code label being printed with a bar code of not more than 3 mm in height, comprising the steps of:
A production controlling method in manufacturing processes in a semiconductor manufacturing apparatus, comprising the steps of:
Dependencies are inferred from the claim text.