Tuning circuit with distributed tunnel junction elements and superconductor integrated circuit comprising the tuning circuit

A superconductor integrated circuit composed of a superconductor microstrip line, a superconductor distributed tunnel junction element, signal input part and signal output part comprising:

• at least one superconductor microstrip line and at least two superconductor tunnel junction elements that the microstrip line and the tunnel junction element are connected alternately;
• wherein
• the microstrip line is composed of an upper strip line to act as the microstrip line and a lower electrode facing to the upper electrode;
• the distributed tunnel junction element composed of an upper electrode, a lower electrode and a distributed tunnel junction between the upper electrode and the lower electrode;
• and
• a superconductor layer of a common electrode of the lower electrode of tunnel junction element and the lower electrode of strip line is layered on a substrate;
• an insulation layer is layered on the superconductor layer of the common electrode;
• the tunnel junction and the upper electrode of the tunnel junction element are arranged on the common lower electrode through a contact hole of the insulation layer;
• the upper line of the microstrip line is contacted to the upper electrode of the tunnel junction element through the contact hole of the insulation layer.