Polishing tool and polishing apparatus
AssigneeEbara Corporation
InventorsKazuto Hirokawa, Hiroshi Sakabe
Life of this patent
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Abstract
A polishing tool is used for polishing a workpiece in a state such that the workpiece is pressed against and brought into sliding contact with the polishing tool. The polishing tool is formed of thermoplastic resin having an average glass transition temperature (Tg) ranging from 270 K to 400 K. The thermoplastic resin includes a first phase having a low glass transition temperature (Tg) of 320 K or lower within a range of from 10 weight % to 90 weight %, and a second phase having a high glass transition temperature (Tg) of 320 K or higher within a range of from 90 weight % to 10 weight %.
Claims31
A polishing tool for polishing a workpiece in a state such that the workpiece is brought into sliding contact with said polishing tool, said polishing tool comprising thermoplastic resin having an average glass transition temperature (Tg) ranging from 270 K to 400 K.
A polishing tool for polishing a workpiece in a state such that the workpiece is brought into sliding contact with said polishing tool, said polishing tool comprising thermoplastic resin including a first phase having a low glass transition temperature (Tg) of 320 K or lower within a range of from 10 weight % to 90 weight % and a second phase having a high glass transition temperature (Tg) of 320 K or higher within a range of from 90 weight % to 10 weight %.
A polishing tool for polishing a workpiece in a state such that the workpiece is brought into sliding contact with said polishing tool, said polishing tool comprising thermoplastic resin, which is produced by aromatic vinyl type monomers in a range of from 0 weight % to 80 weight %, at least one of acrylic ester type monomers and methacrylic acid ester type monomers in a range of from 0 weight % to 100 weight %, and vinyl type monomers to be copolymerized with said aromatic vinyl type monomers and said at least one of acrylic ester type monomers and methacrylic acid ester type monomers in a range of from 0 weight % to 50 weight %, said thermoplastic resin having a weight average molecular weight ranging from 5,000 to 5,000,000.
A polishing apparatus for polishing a workpiece, said polishing apparatus comprising:
- a polishing tool;
- and
- a top ring for holding and pressing a workpiece against said polishing tool to bring the workpiece into sliding contact with said polishing tool, wherein said polishing tool comprises thermoplastic resin having an average glass transition temperature (Tg) ranging from 270 K to 400 K.
A polishing apparatus for polishing a workpiece, said polishing apparatus comprising:
- a polishing tool;
- and
- a top ring for holding and pressing a workpiece against said polishing tool to bring the workpiece into sliding contact with said polishing tool,
- wherein said polishing tool comprises thermoplastic resin including a first phase having a low glass transition temperature (Tg) of 320 K or lower within a range of from 10 weight % to 90 weight %, and a second phase having a high glass transition temperature (Tg) of 320 K or higher within a range of from 90 weight % to 10 weight %.
A polishing apparatus for polishing a workpiece, said polishing apparatus comprising:
- a polishing tool;
- and
- a top ring for holding and pressing a workpiece against said polishing tool to bring the workpiece into sliding contact with said polishing tool,
- wherein said polishing tool comprises thermoplastic resin, which is produced by aromatic vinyl type monomers in a range of from 0 weight % to 80 weight %, at least one of acrylic ester type monomers and methacrylic acid ester type monomers in a range of from 0 weight % to 100 weight %, and vinyl type monomers to be copolymerized with said aromatic vinyl type monomers and said at least one of acrylic ester type monomers and methacrylic acid ester type monomers in a range of from 0 weight % to 50 weight %, said thermoplastic resin having a weight average molecular weight ranging from 5,000 to 5,000,000.
A polishing method comprising:
- pressing a workpiece against a polishing tool so that the workpiece is brought into sliding contact with the polishing tool, wherein the polishing tool comprises thermoplastic resin having an average glass transition temperature (Tg) ranging from 270 K to 400 K.
A polishing method comprising:
- bringing a workpiece into sliding contact with a polishing tool, wherein the polishing tool comprises thermoplastic resin including a first phase having a low glass transition temperature (Tg) of 320 K or lower within a range of from 10 weight % to 90 weight %, and a second phase having a high glass transition temperature (Tg) of 320 K or higher within a range of from 90 weight % to 10 weight %.
A polishing method comprising:
- bringing a workpiece into sliding contact with a polishing tool, wherein the polishing tool comprises thermoplastic resin, which is produced by aromatic vinyl type monomers in a range of from 0 weight % to 80 weight %, at least one of acrylic ester type monomers and methacrylic acid ester type monomers in a range of from 0 weight % to 100 weight %, and vinyl type monomers to be copolymerized with the aromatic vinyl type monomers and the at least one of acrylic ester type monomers and methacrylic acid ester type monomers in a range of from 0 weight % to 50 weight %, the thermoplastic resin having a weight average molecular weight ranging from 5,000 to 5,000,000.
A polishing method comprising:
- bringing a workpiece into sliding contact with a polishing tool, wherein the polishing tool comprises thermoplastic resin;
- and
- adjusting an atmospheric temperature around the polishing tool during said pressing so that the atmospheric temperature is higher than a glass transition temperature of the polishing tool.
Dependencies are inferred from the claim text.