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US 2003/0143788 A1Published application
Method of manufacturing an emitter
AssigneeHewlett-Packard Development Company, L.P.
InventorsZhizhang Chen, Paul J. Benning, Sriram Ramamoorthi, Thomas Novet
Life of this patent
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Abstract
An emitter includes an electron supply and a tunneling layer disposed on the electron supply. A cathode layer is disposed on the tunneling layer. A conductive electrode has multiple layers of conductive material. The multiple layers include a protective layer disposed on the cathode layer. The conductive electrode has been etched to define an opening thereby exposing a portion of the cathode layer.
Claims69
An emitter, comprising:
- an electron supply;
- a tunneling layer disposed on the electron supply;
- a cathode layer disposed on the tunneling layer;
- and
- a conductive electrode having multiple layers of conductive material including a protective layer disposed on the cathode layer and wherein the conductive electrode has been etched to define an opening thereby exposing a portion of the cathode layer.
2 more elements
An emitter, comprising:
- a cathode layer having an emissive surface;
- an electron lens disposed at a predetermined distance from the emissive surface;
- and
- at least one sacrificial layer disposed between the cathode layer and the electron lens, the at least one sacrificial layer having an opening substantially aligned with said emissive surface.
1 more element
A storage device, comprising:
- at least one emitter to generate an electron beam from a cathode layer, the emitter having a conductive protective layer and defining an opening from which the electron beam is generated disposed on the cathode layer;
- a lens for focusing the electron beam to create a focused beam;
- and
- a storage medium in close proximity to the at least one emitter, the storage medium having a storage area being in one of a plurality of states to represent the information stored in that storage area;
- such that:
- an effect is generated when the focused beam strikes the storage area;
- the magnitude of the effect depends on the state of the storage area;
- and
- the information stored in the storage area is read by measuring the magnitude of the effect.
6 more elements
An emitter, comprising:
- an electron supply;
- a tunneling layer formed on the electron supply;
- a cathode layer formed on the tunneling layer;
- and
- a conductive protective layer disposed on the cathode layer wherein the conductive protective layer has been etched to define an opening thereby exposing a portion of the cathode layer for electron emission.
2 more elements
An emitter, comprising:
- a substrate;
- an insulator layer formed on the substrate and having a first opening defined within;
- an emission layer disposed over the insulator layer and first opening and contacting the substrate;
- a tunneling layer formed on the emission layer;
- a cathode layer disposed on the tunneling layer wherein a portion of the cathode layer on the tunneling layer is an electron-emitting surface;
- and
- a conductive protective layer disposed on the cathode layer and defining a second opening substantially aligned with the first opening.
4 more elements
An integrated circuit, comprising:
- a substrate;
- at least one emitter formed on the substrate including,
- an insulator layer having at least one opening to define the location and shape of the at least one flat emitter device,
- an emission layer disposed within the at least one opening of the insulator layer and further disposed over the insulator layer;
- a tunneling layer disposed over the emission layer;
- a cathode layer disposed over the tunneling dielectric;
- and
- a protective layer disposed over cathode layer, the protective layer having at least one opening in substantial alignment with the at least one opening of the insulator layer.
5 more elements
A method for creating an emitter having a cathode emission surface, comprising the steps of:
- forming a protective layer that is conductive on the cathode emission surface;
- creating an electronic lens structure over the protective layer;
- and
- etching the protective layer to expose the cathode emission surface.
1 more element
A method for creating an emitter on an electron supply, comprising the steps of:
- applying a tunneling layer on the electron supply;
- applying a cathode layer on the tunneling layer;
- applying a protective layer that is conductive on the cathode layer;
- applying an electron lens structure on the protective layer;
- and
- creating an opening in the electron lens structure and protective layer to the cathode surface.
3 more elements
A method for creating an emitter, comprising the steps of:
- creating a tunneling layer over an electron supply surface;
- applying a cathode layer over the tunneling layer;
- applying a first protective layer on the cathode layer;
- applying a first conductive layer on the first protective layer;
- applying a second protective layer on the first conductive layer;
- applying a spacer layer on the second protective layer;
- applying a second conductive layer on the spacer layer;
- creating an opening between the second conductive layer and the second protective layer;
- etching the second protective layer to the first conductive layer;
- etching the first conductive layer to the protective layer;
- and
- etching the first protective layer to the cathode layer.
9 more elements
Dependencies are inferred from the claim text.