Titanium oxide photocatalyst thin film and production method of titanium oxide photocatalyst thin film
AssigneeFuji Xerox Co., Ltd.
InventorsShigemi Ohtsu, Tatsuya Maruyama, Eiichi Akutsu, Kazuhito Hashimoto
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Abstract
The present invention provides a titanium oxide photocatalytic thin film having a surface layer containing silicon oxide and titanium oxide and a production method for producing a titanium oxide photocatalytic thin film having a surface layer containing silicon oxide and titanium oxide and comprising a step of radiating excimer beam to the titanium oxide thin film while heating substrate on which the titanium oxide thin film is disposed in vacuum or gas atmosphere in the presence of a silicon-including compound.
Claims20
A titanium oxide photocatalytic thin film comprising a surface layer including silicon oxide and titanium oxide.
A production method of a titanium oxide photocatalytic thin film comprising a surface layer including silicon oxide and titanium oxide, the production method comprising the steps of:
- forming a titanium oxide thin film on a substrate;
- and
- radiating excimer beam to the titanium oxide thin film while heating the substrate in a vacuum or a gas atmosphere in the presence of a compound, which includes silicon.
Dependencies are inferred from the claim text.