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US 2003/0143390 A1Published application
Nanoporous low dielectric constant polymers with hollow polymer particles
OwnerJim Drageinventor
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Abstract
A nanoporous polymer comprises hollow structures fabricated from crosslinked polymeric strands. The hollow structures are further coupled to other crosslinked polymeric strands by a covalent bond. Particularly contemplated nanoporous polymers have a Tg of no less than 400° C. and a dielectric constant k of no more than 2.5.
Claims20
A nanoporous polymer, comprising:
- a plurality of first polymeric strands crosslinked with each other and forming a hollow structure;
- and
- a plurality of second polymeric strands crosslinked with each other and coupled to at least one of the first polymeric strands via a covalent bond.
A method of forming a nanoporous polymer, comprising:
- providing at least one hollow structure fabricated from a plurality of crosslinked first polymeric strands;
- providing a plurality of second polymeric strands;
- combining the at least one hollow structure and the plurality of second polymeric strands;
- crosslinking at least one of the second polymeric strands with another one of the second polymeric strands;
- and
- coupling at least one of the first polymeric strands with at least one of the second polymeric strands via a covalent bond.
3 more elements
Dependencies are inferred from the claim text.