Supplying and exhausting system in plasma polymerizing apparatus
AssigneeLG Electronics Inc.
InventorsYoung-Man Jeong, Su-Won Lee, Dong-Sik Youn
Life of this patent
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Abstract
A plasma polymerizing apparatus is provided which comprises at least one chamber in which sheet to be coated can be moved continuously, at least one gas inlet supplying reactive gas into the chamber, and at least one gas outlet exhausting the reactive gas out of the chamber, wherein the gas inlet and the gas outlet are disposed on the chamber in such a way that reactive gas flows in substantially parallel with moving direction of the sheet.
Claims23
A supplying and exhausting system for a plasma polymerizing apparatus in which a substrate moves continuously comprises
- a gas inlet for supplying gas to a polymerizing chamber, and
- a gas outlet for exhausting reactive gas supplied through the gas inlet,
- wherein the gas inlet and outlet are installed in such a way that the reactive gas flows in substantially parallel with the moving direction of the substrate.
A supplying and exhausting system for a plasma polymerizing apparatus in which a substrate moves continuously comprises
- a gas inlet for supplying gas to a polymerizing chamber, and
- a gas outlet for exhausting reactive gas supplied through the gas inlet,
- wherein the substrate moves horizontally in the polymerizing chamber and the gas inlet and outlet are installed in such a way that the reactive gas flows in substantially parallel with the moving direction of the substrate.
A supplying and exhausting system for a plasma polymerizing apparatus in which a substrate moves continuously comprises
- a gas inlet for supplying gas to a polymerizing chamber, and
- a gas outlet for exhausting reactive gas supplied through the gas inlet,
- wherein the substrate moves in the vertical direction in the polymerizing chamber and the gas inlet and outlet are installed in such a way that the reactive gas flows in substantially parallel with the moving direction of the substrate.
Dependencies are inferred from the claim text.