Piezoelectrically controllable microfluid actor system
AssigneeEppendorf AG
InventorDietmar Sander
Life of this patent
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Abstract
A piezoelectrically controllable microfluid actor system, comprising a planar substrate which has at least one cavity on at least one side and has at least one passage which has an aperture in the cavity, and at least one diaphragm which has its border mounted on one side of the substrate so as to span the cavity, which has at least two superposed and interconnected diaphragm layers of which at least one is an electrically controllable piezoceramic element, and which is adapted to be deflected into the cavity by means of an electric drive.
Claims38
A piezoelectrically controllable microfluid actor system, comprising:
- a planar substrate (2) which has at least one cavity (10) on at least one side and has at least one passage (11, 13) which has an aperture in the cavity (10), and
- at least one diaphragm (4) which has its border mounted on one side of the substrate (2) so as to span the cavity (10), which has at least two superposed and interconnected diaphragm layers (6, 7) of which at least one is an electrically controllable piezoceramic element, and which is adapted to be deflected into the cavity (10) by means of an electric drive.
A microfluidic proportioning device including at least one fluid actor system comprising:
- a planar substrate (2) which has at least one cavity (10) on at least one side and has at least one passage (11, 13) which has an aperture in the cavity (10), and
- at least one diaphragm (4) which has its border mounted on one side of the substrate (2) so as to span the cavity (10), which has at least two superposed and interconnected diaphragm layers (6, 7) of which at least one is an electrically controllable piezoceramic element, and which is adapted to be deflected into the cavity (10) by means of an electric drive.
Dependencies are inferred from the claim text.