Stereoscopic three-dimensional metrology system and method
AssigneeApplied Precision, LLC
InventorsDonald B. Snow, Raymond H. Kraft, John T. Strom
Life of this patent
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Abstract
A stereoscopic three-dimensional optical metrology system and method accurately measure the location of physical features on a test article in a manner that is fast and robust to surface contour discontinuities. Disclosed embodiments may image a test article from two or more perspectives through a substantially transparent fiducial plate bearing a fiducial marking; camera viewing angles and apparent relative distances between a feature on a test article and one or more fiducials may enable accurate calculation of feature position.
Claims30
A method of measuring a location of a physical feature on a test article;
- said method comprising:
- supporting a test article to be imaged;
- interposing a fiducial plate bearing a fiducial between said test article and an imaging device;
- imaging a feature of said test article and said fiducial;
- and
- measuring a location of said feature relative to said fiducial.
A metrology system comprising:
- a stage operative to support an article to be imaged;
- an imaging device selectively oriented relative to said stage and operative to acquire image data on an image plane;
- and
- a fiducial plate, bearing a fiducial, interposed between said article to be imaged and said imaging device.
Dependencies are inferred from the claim text.