X-ray-reflective mirrors exhibiting reduced thermal stress, and X-ray optical systems comprising same

The X-ray-reflective mirror of claim I, comprising multiple first thermal-transfer members each having a respective first end attached to a respective location on the mirror outside the effective region and a respective second end connected to a cooling mechanism, such that heat is conducted from the mirror through the first thermal-transfer members to the cooling mechanism.

A method for conducting heat, caused by absorption of incident X-ray radiation, away from an X-ray-reflective mirror having a reflective surface and an effective region of the reflective surface, the method comprising:

• outside the effective region, attaching to the mirror at least one thermaltransfer member such that X-rays incident to or reflecting from the effective region are not obstructed by the thermal-transfer member, the thermal-transfer member being thermally conductive so as to form a heat-conduction pathway away from the mirror and having a rigidity sufficiently low so as to prevent transmission of mechanical stress to the mirror via the thermal-transfer member;
• and
• via the thermal-transfer member, conducting heat away from the mirror without imparting mechanical stress to the mirror so as to prevent accumulation of heat and stress in the mirror that otherwise would deform the mirror sufficiently to cause the mirror to exhibit an optical performance outside of acceptable specifications.