Multiple translational motion bump stops for movable structure having torsional hinge

An optical device, comprising:

• a movable mirror having functional components lying within a plane defined by holes formed in a single piece of substantially planar material, the movable mirror components comprising:
• a frame portion;
• a first movable portion hinged to the frame portion by a first pair of hinges spaced apart along a first axis in the plane, such that the first movable portion can pivot relative to the frame portion about the first axis, and such that the first pair of hinges act as torsional springs when the first movable portion pivots relative to the frame portion;
• the first movable portion having a first edge that is substantially parallel with and immediately adjacent to an edge of the frame portion, such that a first tolerance fit space exists between the first edge of the first movable portion and the frame portion edge;
• and
• a first set of at least two projections extending from at least one of the first edge of the first movable portion and the frame portion edge, and extending within the first tolerance fit space, the first set of projections being adapted to limit translational motion of the first movable portion relative to the frame portion, wherein the first set of projections are substantially adjacent to each other and are on a same side of the first axis.

A movable mirror having functional components lying within a plane defined by holes formed in a single piece of substantially planar material, comprising:

• a frame portion;
• a first movable portion hinged to the frame portion by a first pair of hinges spaced apart along a first axis in the plane, such that the first movable portion can pivot relative to the frame portion about the first axis, and such that the first pair of hinges act as torsional springs when the first movable portion pivots relative to the frame portion;
• the first movable portion having a first edge that is substantially parallel with and immediately adjacent to an edge of the frame portion, such that a first tolerance fit space exists between the first edge of the first movable portion and the frame portion edge;
• and
• a first set of at least two projections extending from at least one of the first edge of the first movable portion and the frame portion edge, and extending within the first tolerance fit space, the first set of projections being adapted to limit translational motion of the first movable portion relative to the frame portion, wherein the first set of projections are substantially adjacent to each other and are on a same side of the first axis.

A movable mirror having functional components lying within a plane defined by holes formed in a single piece of substantially planar silicon crystal material, the movable mirror comprising:

• a frame portion forming a border around the movable mirror;
• an intermediate gimbals portion hinged to the frame portion by a first pair of hinges, each hinge of the first pair of hinges extending along a first axis in the plane, such that each hinge of the first pair of hinges acts as a torsional spring when the intermediate gimbals portion pivots about the first axis relative to the frame portion;
• on each side of the first axis for each hinge of the first hinge pair, there is a first tolerance fit space formed between an outer edge of the intermediate gimbals portion and an inner edge of the frame portion, wherein the outer edge of the intermediate gimbals portion is parallel with and adjacent to the inner edge of the frame portion at the first tolerance fit space, and
• extending within each first tolerance fit space, there is a first set of at least two adjacent projections extending from at least one of the outer edge of the intermediate gimbals portion and the inner edge of the frame portion, the first set of projections being adapted to limit translational motion of the intermediate gimbals portion relative to the frame portion;
• an inner mirror portion hinged to the intermediate gimbals portion by a second pair of hinges, each hinge of the second pair of hinges extending along a second axis in the plane, such that each hinge of the second pair of hinges acts as a torsional spring when the inner mirror portion pivots about the second axis relative to the intermediate gimbals portion, wherein the second axis is substantially perpendicular to the first axis, and the inner mirror portion has a reflective mirror surface formed thereon;
• and
• on each side of the second axis for each hinge of the second hinge pair, there is a second tolerance fit space formed between an outer edge of the inner mirror portion and an inner edge of the intermediate gimbals portion, wherein the outer edge of the inner mirror portion is parallel with and adjacent to the inner edge of the intermediate gimbals portion at the second tolerance fit space, and
• extending within each second tolerance fit space, there is a second set of at least two adjacent projections extending from at least one of the outer edge of the inner mirror portion and the inner edge of the intermediate gimbals portion, the second set of projections being adapted to limit translational motion of the inner mirror portion relative to the intermediate gimbals portion.