Laser scanning microscope
AssigneeCarl Zeiss Jena GmbH
InventorGuenter Schoeppe
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AssigneeCarl Zeiss Jena GmbH
InventorGuenter Schoeppe
Estimating the term…
In a laser scanning microscope comprising a deflecting device, which is provided for variable deflection of a laser beam about a deflection angle, and a control unit, which controls the deflecting device via a control signal and measures, at least temporarily, a present deflection angle value, it is envisaged that, at the time of measurement of the present deflection angle value, a testing structure, which comprises at least one structural element whose position is assigned to a predetermined deflection angle value, is arranged downstream of the deflecting device, a detecting device is provided, which emits a detection signal when the laser beam is directed to the structural element, and the control unit assigns the present control signal to the predetermined deflection angle value upon reception of the detection signal.
A laser scanning microscope comprising
A laser scanning microscopy method, wherein
Dependencies are inferred from the claim text.