Exposure method and apparatus

An exposure apparatus for exposing a second object with an exposure light beam via a pattern of a first object, the exposure apparatus comprising:

• a base member;
• a movable stage which is arranged movably on the base member and on which the first object is placed;
• and
• a coarsely movable stage which drives the movable stage in a predetermined direction without being in contact with the base member.

A method for producing an exposure apparatus for exposing a second object with an exposure light beam via a pattern of a first object, the method comprising:

• arranging a base member on a bottom surface side of the first object at a position at which the first object is to be arranged;
• providing a movable stage such that the movable stage is movable and places the first object thereon, on the base member;
• providing a guide member along a predetermined direction on the base member;
• arranging a coarsely movable stage so as to be movable along the guide member and opposingly to at least a part of the movable stage;
• and
• coupling the movable stage and the coarsely movable stage to one another.

An exposure method for exposing a second object with an exposure light beam via a pattern of a first object, the exposure method comprising:

• supporting a second base member in a state capable of making displacement with a predetermined number of degrees of freedom on a first base member;
• placing a first movable stage for positioning the first object movably on the second base member;
• placing a second movable stage for positioning the second object movably on the first base member;
• and
• controlling an attitude of the second base member with respect to the first base member so as to suppress vibration caused by movement of the first and second movable stages.

An exposure apparatus for exposing a second object with an exposure light beam via a pattern of a first object, the exposure apparatus comprising:

• a first base member which is supported by the aid of a plurality of vibration-preventive pedestals;
• a second base member which is placed on the first base member by the aid of a plurality of expandable/contractible or displaceable first attitude control members;
• a first movable stage which is arranged movably on the second base member and which positions the first object;
• and
• a second movable stage which is arranged movably on the first base member and which positions the second object.

A method for producing an exposure apparatus for exposing a second object with an exposure light beam passing through a pattern of a first object, the method comprising:

• supporting a first base member by the aid of a plurality of vibration-preventive pedestals;
• placing a second base member on the first base member by the aid of a plurality of expandable/contractible or displaceable first attitude control members;
• placing, on the second base member, a first movable stage so as t be movable and position the first object;
• and
• placing, on the first base member, a second movable stage so as to be movable and position the second object.