Formation of protective coatings for color filters
AssigneeIntel Corporation
InventorNEIL WESTER
Life of this patent
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Abstract
A structure and method for producing color filters with a protective silation layer is described. In one embodiment, each filter is coated with a silation layer to prevent bleeding of material between closely spaced filters during the fabrication process. In a second embodiment, the silation layer is used to protect an array of filters from physical damage during detaping operations. In a third embodiment, the silation layer is used before fabrication later filters in a color filter array to prevent damage to previous filter layers.
Claims17
A structure for detecting light comprising:
- a light sensor;
- a first color filter deposited over the light sensor;
- and
- a protective polymer silation layer deposited over the first color filter.
A method of fabricating a light detecting structure comprising:
- fabricating a first color filter over a first photodiode on a substrate to form a filter-photodiode combination;
- placing the substrate including the filter-photodiode combination in a chamber and exposing the filter-photodiode combination to a silane compound in vapor form to form a silane coating over the filter-photodiode combination;
- and
- removing the filter-photodiode combination from the chamber.
A structure for generating a digital image comprising:
- a substrate;
- a plurality of photo-detectors, formed on said substrate;
- a plurality of color filters, each photo-detector in said plurality of photo-detectors having an input covered by a filter in said plurality of color filters, a first filter in said plurality of color filters designed to block a first frequency of light and a second filter in said plurality of color filters designed to block a second frequency of light;
- support electronics which generates a color digital image by combining data from at least two photo-detectors in the plurality of photo-detectors;
- and
- a silane protective layer around said plurality of photo-detectors.
A structure for detecting light comprising:
- a means for sensing light;
- a mean for filtering the color of light received by said means for sensing light;
- a means for protecting the means for filtering the color of light, said means for protecting including a silation material.
Dependencies are inferred from the claim text.