Back to results
US 2003/0141884 A1Published application
Contactor having conductive particles in a hole as a contact electrode
AssigneeFujitsu Limited
InventorsShigeyuki Maruyama, Susumu Kida, Naoyuki Watanabe, Takafumi Hashitani, Ei Yano, Ichiro Midorikawa
Life of this patent
Estimating the term…
Abstract
A contactor is provided which contactor comprises an insulating substrate, a concave portion formed in the insulating substrate and extending in a perpendicular direction from a surface thereof, and elastic conductive particles disposed in the concave portion. A part of one of the conductive particles protrudes from the surface of the insulating substrate.
Claims34
A contactor comprising:
- an insulating substrate;
- a concave portion formed in said insulating substrate and extending in a perpendicular direction from a surface thereof;
- and
- a plurality of conductive particles having elasticity and disposed in said concave portion, a part of one of said conductive particles protruding from the surface of said insulating substrate.
1 more element
A contactor comprising:
- an insulating substrate;
- a concave portion formed in said insulating substrate and extending in a perpendicular direction from a surface thereof;
- a conductive liquid filling said concave portion;
- and
- a conductive particle disposed in said concave portion and having a specific gravity different from a specific gravity of said conductive liquid,
- wherein a difference between said specific gravity of said conductive particle and said specific gravity of said conductive liquid causes a part of said conductive particle to protrude from a surface of said insulating substrate.
3 more elements
A contactor comprising:
- an insulating substrate;
- a concave portion formed in said insulating substrate and extending in a perpendicular direction from a surface thereof;
- a plurality of conductive particles disposed in said concave portion, said conductive particles being aligned with each other in a direction in which said concave portion extends, and being contacted with each other;
- an insulating film formed on the surface of said insulating substrate;
- and
- a conductive portion formed at a position of said insulating film corresponding to an opening of said concave portion,
- wherein a coefficient of linear expansion of each of said conductive particles is larger than a coefficient of linear expansion of said insulating substrate, and when said contactor is heated, each of said conductive particles undergoes thermal expansion so that said conductive portion protrudes by being pressed by said conductive particles.
4 more elements
A contactor comprising:
- an insulating substrate;
- a concave portion formed in said insulating substrate and extending in a perpendicular direction from a surface thereof;
- a conductive liquid filling said concave portion;
- a conductive particle mixed in said conductive liquid;
- an insulating film formed on the surface of said insulating substrate;
- and
- a conductive portion formed at a position of said insulating film corresponding to an opening of said concave portion,
- wherein, when said contactor is heated, said conductive particle mixed in said conductive liquid undergoes thermal expansion so that said conductive portion protrudes by being pressed by said conductive particle mixed in said conductive liquid.
5 more elements
A test method using a contactor comprising an insulating substrate;
- a concave portion formed in said insulating substrate and extending in a perpendicular direction from a surface thereof;
- and a plurality of conductive particles having elasticity and disposed in said concave portion, a part of one of said conductive particles protruding from the surface of said insulating substrate, the method comprising the steps of:
- placing an object to be tested opposite to said contactor so that an external connection terminal of said object to be tested is aligned with said part of one of said conductive particles protruding from said surface of said insulating substrate;
- and
- pressing said contactor against said object to be tested so that a surface of said object to be tested contacts said surface of said insulating substrate with a predetermined low pressure.
2 more elements
A test method using a contactor comprising an insulating substrate;
- a concave portion formed as a through hole penetrating through said insulating substrate in a perpendicular direction;
- and a plurality of conductive particles having elasticity and disposed in said concave portion, parts of said conductive particles on both ends of said through hole protruding from both surfaces of said insulating substrate, respectively, the method comprising the steps of:
- placing a test substrate opposite to one surface of said contactor so that a connection terminal of said test substrate contacts a part of said conductive particles at one end of said through hole protruding from one surface of said insulating substrate;
- placing an object to be tested opposite to the other surface of said contactor so that an external connection terminal of said object to be tested contacts a part of said conductive particles at the other end of said through hole protruding from the other surface of said insulating substrate;
- and
- pressing said test substrate and said object to be tested against said contactor with a predetermined low pressure so that said test substrate and said object to be tested contact said contactor and electrically connect to each other.
3 more elements
A contactor comprising:
- an insulating substrate;
- a concave portion formed in said insulating substrate and extending in a perpendicular direction from a surface thereof;
- and
- a conductor disposed in said concave portion, the conductor being in either a liquid phase or an intermediate phase between a liquid phase and a solid phase at an operating temperature,
- wherein a part of said conductor protrudes from the surface of said insulating substrate, the part formed as a protrusion.
2 more elements
A test method using a contactor comprising an insulating substrate;
- a concave portion formed in said insulating substrate and extending in a perpendicular direction from a surface thereof;
- and a conductor disposed in said concave portion, the conductor being in either a liquid phase or an intermediate phase between a liquid phase and a solid phase at an operating temperature, in which contactor a part of said conductor protrudes from the surface of said insulating substrate, the part formed as a protrusion, the method comprising the steps of:
- placing an object to be tested opposite to said contactor so that an external connection terminal of said object to be tested is aligned with said protrusion;
- and
- pressing said contactor against said object to be tested so that a surface of said object to be tested contacts said surface of said insulating substrate with a predetermined low pressure.
2 more elements
Dependencies are inferred from the claim text.