US 2003/0141861 A1Published application

Probe station

AssigneeCascade Microtech, Inc.

InventorsPeter Navratil, Brad Froemke, Craig Stewart, Anthony Lord, Jeff Spencer, Scott Runbaugh, Gavin Fisher, Pete McCann, Rod Jones

Life of this patent

Estimating the term…

A probe station.

Dependent claims

A probe station comprising:

Dependencies are inferred from the claim text.

G01R 31/2886
Testing of integrated circuits [IC]: features relating to contacting the IC under test, e.g. probe heads; chucks
G01R 31/2831
Testing of electronic circuits specially adapted for particular applications not provided for elsewhere: testing of materials or semi-finished…
G01R 31/2887
Features relating to contacting the IC under test, e.g. probe heads; chucks: involving moving the probe head or the IC under test; docking stations
G01R 1/18
General constructional details: screening arrangements against electric or magnetic fields, e.g. against earth's field

From the US filing history. Foreign family members aren’t listed.

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