Close coupled match structure for RF drive electrode
AssigneeTokyo Electron Limited
InventorThomas H. Windhorn
Life of this patent
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Abstract
An electrode assembly for supplying RF power from a RF power source having an output impedance to an electrically non-linear medium, the assembly being composed of: a drive electrode in communication with the medium and forming with the medium a load impedance; and an impedance match network coupled between the RF power source and the drive electrode for matching the output impedance of the RF source to the load impedance. The match network has an output component that is directly connected to the drive electrode. The electrode assembly can further have a body of RF energy absorbing material disposed between the match network and the drive electrode, the absorbing material having a frequency dependent energy absorption characteristic which increases with frequency.
Claims15
An electrode assembly for supplying RF power from n RF power source having an output impedance to an electrically non-linear medium, said assembly comprising:
- a drive electrode in communication with the medium and forming with the medium a load impedance;
- and
- an impedance match network coupled between the RF power source and said drive electrode for matching the output impedance of the RF source to the load impedance, said match network having an output component that is directly connected, physically and electrically, to said drive electrode.
An electrode assembly for supplying RF power from an RF power source having an output impedance to an electrically non-linear medium, said assembly comprising:
- a drive electrode in communication with the medium and forming with the medium a load impedance;
- an impedance match network coupled between the RF power source and said drive electrode for matching the output impedance of the RF source to the load impedance;
- and
- a body of RF energy absorbing material disposed between said match network and said drive electrode, said absorbing material having a frequency dependent energy absorption characteristic which increases with frequency.
Dependencies are inferred from the claim text.