Megasonic probe energy director
AssigneeAkrion Technologies, Inc.
InventorMario E. Bran
Life of this patent
Estimating the term…
Abstract
A megasonic cleaning apparatus configured to provide effective cleaning of a substrate without causing damage to the substrate is provided. The apparatus includes a megasonic probe, a transducer configured to energize the probe, and a heat transfer element disposed between the transducer and the probe. The heat transfer element may be configured to direct the sonic energy from the transducer toward specific areas of the probe so as to reduce the effect of normal-incident waves relative to shallow-angle waves. Alternatively, a rear end face of the probe may be configured for this purpose. Another embodiment provides a coupler disposed between the heat transfer element and the rear end face of the probe for directing the sonic energy from the transducer toward specific areas of the probe.
Claims24
An assembly for cleaning a thin, flat substrate comprising:
- a transmitter to be positioned above a substantially flat surface of the substrate so that when liquid is applied to a small gap between the transmitter and the substrate, a meniscus of liquid is formed between the transmitter and the substrate;
- and
- a transducer coupled to the transmitter in a manner to create a transmission path for transmitting megasonic vibration from the transducer through the transmitter to the substrate, the transducer being coupled to the transmitter in a manner to attenuate the energy transmitted to a lowermost portion of the transmitter to prevent damage to delicate devices on the substrate that are substantially directly beneath the lowermost portion, while portions of the transmitter adjacent the lowermost portion are not so attenuated.
An assembly for cleaning a thin flat substrate comprising:
- a transmitter including an elongated element with a lower edge to be positioned above but closely adjacent to a flat surface of the substrate;
- a transducer for translating electrical energy into megasonic vibration;
- and
- a heat transfer element positioned between the transducer and the transmitter to transmit vibration to the transmitter;
- wherein
- the heat transfer element is configured to attenuate the energy transmitted to a portion of the probe.
An assembly for cleaning a thin flat substrate comprising:
- a transmitter having a lower edge to be positioned above but closely adjacent to a flat surface of the substrate;
- a transducer coupled to the transmitter for translating electrical energy into megasonic vibration;
- and
- wherein a face of the transmitter coupled to the transducer is configured to attenuate the energy transmitted to a portion of the transmitter.
A megasonic probe assembly for cleaning a thin flat substrate comprising:
- a probe including an elongated rod with a lower edge along the length of the rod to be positioned above but closely adjacent to a flat surface of the substrate;
- a transducer for translating electrical energy into megasonic vibration;
- a heat transfer element positioned between the transducer and a rear end face of the probe;
- and
- a coupler positioned between the heat transfer element and the rear end face of the probe, the coupler transmitting the megasonic vibration to the rear end of the probe, the coupler being configured to attenuate the energy transmitted to a portion of said probe.
A megasonic probe assembly for cleaning a substrate comprising:
- a transmitter having a portion spaced from but closely adjacent to a substantially flat surface of the substrate so that when liquid is applied to the transmitter and the substrate, a meniscus of liquid is formed between the transmitter and the substrate;
- and
- a transducer coupled to the transmitter in a manner to create a transmission path so that megasonic vibration from the transducer is transmitted to the transmitter and is transmitted through the meniscus to the substrate as normal-incident waves directly beneath the probe lower edge, and shallow-angle waves on either side of the normal-incident waves, said waves being adapted to loosen particles on the substrate, the transducer being coupled to the transmitter in a manner to reduce a ratio of the normal-incident waves to the shallow-angle waves so as to prevent damage of delicate devices on the substrate beneath said lower edge.
A method of cleaning a substrate comprising the steps of:
- providing a transmitter made of a material that is a good conductor of megasonic energy;
- positioning the transmitter so that a lower edge is positioned spaced from but closely adjacent to a substantially flat surface of the substrate so that when liquid is applied to the edge and the substrate, a meniscus of liquid is formed between the edge and the substrate;
- providing a transducer for producing megasonic vibration;
- coupling the transducer to the transmitter so that a transmission path is created to transmit the megasonic vibration into the transmitter;
- and
- creating a barrier in the transmission path so that the liquid vibration is attenuated directly beneath the probe lower edge.
Dependencies are inferred from the claim text.