Array of ultrasound transducers
AssigneeKoninklijke Philips Electronics N.V.
InventorsMareike Klee, Tilman Schlenker, Olaf Dannappel, Hans-Peter Loebl, Georg Schmitz, John Fraser
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Abstract
The invention relates to an array of ultrasound transducers which each comprise a substrate (1), a membrane (2), a first electrode (4), a piezoelectric layer (5), and a second electrode (6), wherein the substrate (1) comprises at least one opening (3) which adjoins the membrane (2) at one side, while the piezoelectric layer (5) has a high piezoelectric coupling coefficient k and is textured. The invention further relates to an ultrasound transducer and to a method of manufacturing an array of ultrasound transducers.
Claims17
An array of ultrasound transducers which each comprise a substrate (1), a membrane (2), a first electrode (4), a piezoelectric layer (5), and a second electrode (6), said substrate (1) comprising at least one opening (3) which adjoins the membrane (2) at one side, wherein said piezoelectric layer (5) is a textured layer.
An array of ultrasound transducers which each comprise a substrate (1), a membrane (2), a first electrode (4), a piezoelectric layer (5), and a second electrode (6), said substrate (1) comprising at least one opening (3) which adjoins the membrane (2) at one side, characterized in that a barrier layer (7) is provided on that side of the membrane (2) which faces the piezoelectric layer (5).
An ultrasound transducer which comprises a substrate (1), a membrane (2), a first electrode (4), a piezoelectric layer (5), and a second electrode (6), the substrate (1) comprising at least one opening (3) which adjoins the membrane(2) at one side, wherein said piezoelectric layer (5) is a textured layer.
A method of manufacturing an array of ultrasound transducers which each comprise a substrate (1), a membrane (2), a first electrode (4), a piezoelectric layer (5), and a second electrode (6), the substrate (1) comprising at least one opening (3) which adjoins the membrane(2) at one side, wherein said piezoelectric layer (5) is manufactured in a textured manner.
Dependencies are inferred from the claim text.