Triode structure field emission display device using carbon nanotubes and method of fabricating the same

A method of fabricating a field emission display device, comprising:

• (a) sequentially forming a transparent cathode layer and an insulation layer on a substrate and performing firing;
• (b) forming a gate electrode on the insulation layer and patterning the gate electrode to form an opening at the center thereof;
• (c) etching the insulation layer to form a well corresponding to the opening and patterning the gate electrode in a strip shape;
• (d) depositing a resistance layer for blocking light on the surface of the gate electrode and the inner wall of the well and patterning the resistance layer to expose the cathode layer at the bottom of the well;
• and
• (e) forming a carbon nanotube field emitting source on the exposed cathode layer.

A method of fabricating a field emission display device which has a triode-structure composed of an cathode layer formed on a substrate, an insulation layer formed on the cathode layer such as to have a well, and a gate electrode formed on the insulation layer such as to have an opening corresponding to the well, the method comprising:

• (a) depositing a protective layer such as to surround the insulation layer and the gate electrode and patterning the protective layer such that the protective layer remains only on the tops of the insulation layer and the gate electrode;
• (b) depositing carbon nanotube paste such as the carbon nanotube paste covers the protective layer and fills the well and the opening;
• (c) radiating light at the rear of the substrate to expose the carbon nanotube paste and the protective layer to the light and performing development to lift off non-exposed carbon nanotube paste and the protective layer, thereby forming a carbon nanotube column;
• and
• (d) firing the carbon nanotube column to lower it and performing surface treatment, thereby forming a field emitting source in which carbon nanotube tips protrude from the surface of the carbon nanotube column.