Method of forming a sample image and charged particle beam apparatus

A method of forming a sample image by scanning a charged particle beam on a sample and forming an image based on secondary signals emitted from said sample, the method comprising the steps of:

• two-dimensionally scanning said charged particle beam on said sample;
• detecting secondary signals emitted from a scanned region;
• forming image data based on said detected secondary signals;
• forming a plurality of composite image data items formed by superposing said plurality of image data items;
• detecting positional displacements in said two-dimensional directions among said plurality of formed composite image data items;
• and
• forming an image by correcting said detected positional displacements.

A method of forming a sample image by scanning a charged particle beam on a sample and forming an image based on secondary signals emitted from said sample, the method comprising the steps of:

• two-dimensionally scanning said charged particle beam on said sample;
• detecting secondary signals emitted from a scanned region;
• forming at least three images based on said detected secondary signals;
• by using at least two of said three images, detecting deformation or positional displacement in the other one of said three images;
• and
• correcting deformations or displacements of said image based on said detected deformation.

A charged particle beam apparatus comprising a charged particle source;

• a deflector for scanning a charged particle beam emitted from said charged particle source;
• and a detector for detecting secondary signals emitted from a scanned region of said charged particle beam, a sample image being formed based on said secondary signals detected by said detector, which further comprises:
• a control unit for two-dimensionally scanning said charged particle beam on said sample;
• detecting secondary signals emitted from a scanned region;
• forming at least three images based on said detected secondary signals;
• by using at least two of said three images, detecting deformation or positional displacement of the other one sheet;
• and correcting deformations or displacements of said image based on said detected deformation.

A method of measuring a dimension of sample by scanning a charged particle beam on a sample, and forming a line profile based on secondary signals emitted from said sample, and measuring a dimension of a measured object on said sample from said line profile, the method comprising the steps of:

• scanning said charged particle beam on said sample;
• detecting secondary signals emitted from a scanned positions;
• forming a plurality of line profiles based on said detected secondary signals;
• detecting positional displacements among said plurality of line profiles;
• superposing said plurality of line profile by correcting said displacements, and
• measuring a dimension of said measured object based on said composite line profile.

A charged particle beam apparatus comprising a charged particle source;

• a deflector for scanning a charged particle beam emitted from said charged particle source;
• and a detector for detecting secondary signals emitted from a scanned region of said charged particle beam, a line profile being formed based on said secondary signals detected by said detector, a dimension of a measured object being measured based on said line profile, which further comprises:
• a control unit for scanning said charged particle beam on said sample;
• detecting secondary signals emitted from a scanned positions;
• forming a plurality of line profiles based on said detected secondary signals;
• detecting positional displacements among said plurality of line profiles;
• superposing said plurality of line profile by correcting said displacements, and measuring a dimension of said measured object based on said composite line profile.

An electron beam apparatus comprising a charged particle source;

• a deflector for scanning a charged particle beam emitted from said charged particle source;
• and a detector for detecting secondary electrons emitted from a scanned region of said electron beam, which further comprises:
• a reflected electron detector for detecting reflected electrons emitted from said sample and/or an X-ray detector for detecting X-rays emitted from said sample;
• and
• an image display unit for display a sample image based on reflected electrons detected by said reflected electron detector or X-rays detected by said X-ray detector, wherein
• a shifting amount of a secondary electron image detected by said secondary electron detector is detected, and a position of a reflected electron image or an X-ray image displayed on said image display unit is corrected based on said shifting amount of the secondary electron image.

A method of forming a sample image by scanning a charged particle beam on a sample and forming an image based on charged particles emitted from said sample, the method comprising the steps of:

• scanning said charged particle beam on said sample plural times;
• obtaining a plurality of images based on detection of secondary signals emitted from said sample based on said plural times of scanning;
• removing images having abnormality from said plurality of images;
• and
• superposing said plurality of images excluding said images having abnormality to form a composite image.

A charged particle beam apparatus comprising a charged particle source;

• a deflector for scanning a charged particle beam emitted from said charged particle source;
• and a detector for detecting secondary signals emitted from a scanned region of said charged particle beam, a sample image being formed based on said secondary signals detected by said detector, which further comprises:
• a control unit which forms a plurality of image data items based on said detected secondary signals, and removing image data items having abnormality from said plurality of image data items, and
• superposing said plurality of images excluding said image data items having abnormality.

A charged particle beam apparatus comprising a charged particle source;

• a deflector for scanning a charged particle beam emitted from said charged particle source on a sample;
• a detector for detecting secondary signals emitted from a scanned region of said charged particle beam, an image memory for storing a sample image formed based on charged particles detected by said detector, wherein
• said image memory is constructed so as to add a plurality of sample images and then to store said added sample image, and comprises means for correcting displacements of said sample images to be added and performing said addition;
• and means for setting a condition of said addition.

A charged particle beam apparatus comprising a charged particle source;

• a deflector for scanning a charged particle beam emitted from said charged particle source;
• and a detector for detecting secondary signals emitted from a scanned region of said charged particle beam, a sample image being formed based on said secondary signals detected by said detector, which further comprises:
• means for forming N0 frames of image data items based on said detected secondary signals, and for forming N1 frames of composite image data items by superposing said N0 frames of image data items;
• and
• setting means for setting said N0 and said N1.