Back to results
US 2003/0141450 A1Published application
Scanning electron microscope
AssigneeCambridge University Technical Services Limited
InventorsJohn Craven, Francis Baker
Life of this patent
Estimating the term…
Loading patent…
Loading patent…
AssigneeCambridge University Technical Services Limited
InventorsJohn Craven, Francis Baker
Estimating the term…
A scanning electrode electron microscope for imaging a sample, the microscope comprising a sample chamber containing a gas in which the sample is positioned in use. A bias member is maintained at a predetermined electrical potential so as to accelerate electrons emitted from the sample. A detection system generates the image of the sample. The detection system comprises an ion collector positioned between the sample and the bias member, the ion collector being maintained at a potential below the predetermined electrical potential to thereby collect the ions from the region between the sample and the bias member. a sensor coupled to the ion collector for determining the member of ions collected thereon; and, a processing system responsive to the sensor to generate an image of the sample.
A scanning electron microscope for imaging a sample, the microscope comprising:
A scanning electron microscope for imaging a sample, the microscope comprising:
A microscope according to any of claims 2 to 7, wherein the one or more elongate members may be shaped so as position the elongate member a constant distance from the sample surface.
A microscope according to any of claims 2 to 8, the or each elongate member having a cross sectional area of below 1.0 mm2.
A microscope according to any of claims 5 to 9, wherein the or each elongate member is maintained at a potential of 0 volts or below.
A microscope according to any of the preceding claims, the ion collector comprising a number of laterally spaced wires.
A microscope according to any of the preceding claims wherein, in use, the ion collector is positioned approximately 1-3 mm from the sample.
A microscope according to any of the preceding claims, wherein the microscope further comprises:
An apparatus according to any of the preceding claims further comprising at least one electrode arranged to be positioned, in use, adjacent to a sample, such that the electrode can be activated to generate an image with a shadowing effect in the direction of the electrode.
Dependencies are inferred from the claim text.