Vacuum treatment system and process for manufacturing workpieces

A process for manufacturing workpieces, comprising the steps of guiding the workpieces to a vacuum treatment, moving the workpieces through a treatment atmosphere in a treatment area guided by a control, and modulating a treatment atmosphere in a treatment area as a function of workpiece position with a defined profile.

Use of the system having a vacuum treatment chamber, comprising elements configured to establish a treatment atmosphere in a treatment area, a sensor arrangement configured to detect the treatment atmosphere momentarily existing in the treatment area, an ACTUAL value sensor of the sensor arrangement for at least one of the elements being a regulating element of a control circuit for the treatment atmosphere in the treatment area, and a workpiece carrier which is drivably movable in the chamber through the treatment area, wherein at least one of the elements modulates the treatment atmosphere in the treatment area according to a defined profile, comprising the step of treating plane substrates of a dimension larger than that of the sputtering source for reactive sputter coating thereof.

Use of a vacuum treatment system having a vacuum treatment chamber, comprising elements configured to establish a treatment atmosphere in a treatment area, a sensor arrangement configured to detect the treatment atmosphere momentarily existing in the treatment area, an ACTUAL value sensor of the sensor arrangement for at least one of the elements being a regulating element of a control circuit for the treatment atmosphere in the treatment area, and a workpiece carrier which is drivably movable in the chamber through the treatment area, wherein at least one of the elements modulates the treatment atmosphere in the treatment area according to a defined profile as a function of the workpiece carrier position, comprising the step of depositing defined layer thickness distribution profiles on substrates in a reactive coating.

A process for manufacturing workpieces, comprising the steps of guiding the workpieces to a vacuum treatment, moving the workpieces past a sputtering source on a circular path, and modulating performance of sputtering source as a function of substrate position such that, with the workpieces situated centrically with respect to the sputtering source, the sputtering source performance passes through a minimum when a circular path is convex and passes through a maximum when the circular path is concave.

A process for manufacturing workpieces, comprising the steps of guiding the workpieces to a reactive vacuum treatment, moving the workpieces past a sputtering source on a circular path which is convex or concave with respect to a sputtering source, and modulating reactive gas flow as a function of substrate position, such that when the workpieces are situated centrically with respect to the sputtering source when a circular path is convex, the flow of the reactive gas passes through a maximum and passes through a minimum when the circular path is concave.

A process for manufacturing workpieces, comprising the steps of guiding the workpieces to a vacuum treatment, moving the workpieces past a sputtering source on a circular path which is convex or concave with respect to the sputtering source, and modulating working gas flow as a function of substrate position, in that, when the workpieces are situated centrically with respect to the sputtering source, the flow passes through a minimum when the circular path is convex and through a maximum when the circular path is concave.

Use of a vacuum treatment system having a vacuum treatment chamber, comprising elements configured to establish a treatment atmosphere in a treatment area, a sensor arrangement configured to detect the treatment atmosphere momentarily existing in the treatment area, an ACTUAL value sensor of the sensor arrangement for at least one of the elements being a regulating element of a control circuit for the treatment atmosphere in the treatment area, and a workpiece carrier which is drivably movable in the chamber through the treatment area, wherein at least one of the elements modulates the treatment atmosphere in the treatment area according to a defined profile as a function of the workpiece carrier position, comprising the step of reactively coating optical components.