Hollow cylindrical cathode sputtering target and process for producing it
AssigneeW. C. Heraeus GmbH
InventorsDavid Lupton, Ralf Heck, Bernd Stenger, Oliver Warkentin
Life of this patent
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Abstract
A hollow cylindrical target for a cathode sputtering unit with a hollow cylindrical sputtering material and a target holder. The sputtering material has an annular cross section and concentrically surrounds a longitudinal segment of the target holder. The target holder extends out of the sputtering material at least at one end of the target to allow connection to the cathode sputtering unit. The at least one part of the target holder that extends from the sputtering material is a single part that can be detached from the target by at least one screw fitting.
Claims38
A hollow cylindrical target for a cathode sputtering unit, comprising a hollow cylindrical sputtering material;
- and a hollow cylindrical target holder, the sputtering material having an annular cross section and being arranged to concentrically surround a longitudinal segment of the target holder so that at least one end of the target holder extends from the sputtering material at least at one end of the target so as to be connectable to the cathode sputtering unit, the at least one end of the target holder that extends from the sputtering material being an individual part that is detachable by at least one screw fitting.
A process for producing a hollow cylindrical target for a cathode sputtering unit, comprising the steps of:
- constructing a target holder from several individual parts so that at least one of the individual parts extends from the sputtering material;
- concentrically surrounding another of the individual parts of the target holder with a sputtering material;
- providing the at least one individual part with a fine thread;
- and screwing either the at least one individual part that extends from the sputtering material together with the another of the individual parts of the target holder that is concentrically surrounded by the sputtering material and undetachably joining the at least one individual part along its outside diameter with an inside diameter of the hollow cylindrical sputtering material.
A process for producing a hollow cylindrical target for a cathode sputtering unit, comprising the steps of:
- constructing a target holder from several individual part so that at least one of the individual parts extends from the sputtering material;
- concentrically surrounding another of the individual parts of the target holder with a sputtering material;
- providing the at least one individual part with a fine thread;
- and screwing the at least one individual part that extends from the sputtering material directly together with the hollow cylindrical sputtering material by a fine thread on the hollow cylindrical sputtering material.
A process for producing a hollow cylindrical target for a cathode sputtering unit, comprising the steps of:
- providing a target holder having an individual part with a flange;
- concentrically surrounding a longitudinal segment of the target holder with a sputtering material so that the individual part of the target holder extends from the sputtering material;
- and joining the flange with the hollow cylindrical sputtering material by at least two screws at one end face of the sputtering material.
Dependencies are inferred from the claim text.