Plasma processing apparatus
AssigneeTokyo Electron Limited
InventorToshiaki Fujisato
Life of this patent
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Abstract
A plasma processing apparatus has a process chamber, an upper electrode, a susceptor which can elevate up and down and serves as a lower electrode and on which a work is placed, a feeder bar connected to an upper surface of the upper electrode and an insulating film formed on the feeder bar and the upper surface of the upper electrode, a bellows which is connected at one end to the susceptor and at the other end to a bottom portion of the process chamber and maintain the vacuum state inside the process chamber. The insulating film has a porous structure formed by thermal-spraying insulating material, e.g., PTFE toward the feeder bar and the upper electrode. The bellows is formed of high purity aluminum or nickel.
Claims24
A plasma processing apparatus comprising:
- a process chamber in which a predetermined process is performed on a work;
- a first electrode which is arranged in said process chamber and on which said work is to be placed;
- a second electrode facing to said first electrode;
- and
- a conductive member which is connected to said second electrode and supplies high-frequency electric power to said second electrode.
A plasma processing apparatus comprising:
- an electrode facing to a susceptor on which a work is to be placed;
- a conductive member which is connected to said electrode and feeds high-frequency electric power to said electrode;
- and
- an insulating film formed on said conductive member and at least a part of a surface of said electrode onto which said conductive member is connected;
- said insulating film being formed by thermal-spraying an insulating material onto said conductive member and said at least a part a surface of said electrode.
A plasma processing apparatus having a process chamber and performing a predetermined process on a work in said process chamber, said process chamber being manufactured by:
- smoothing an inner surface of a cylindrical base member by mechanical working;
- etching out cracks formed on said inner surface of said base member, the crack being formed by said mechanical working;
- and
- forming an insulating film on said inner surface of said base member after said cracks have been etched out.
A plasma processing apparatus comprising:
- a process chamber in which a predetermined process is performed on a work;
- an electrode which is arranged in said process chamber and on which said work is placed;
- and
- a bellows which is connected to a bottom portion of said process chamber and said electrode;
- said bellows being formed of high-purity aluminum, nickel, or alloy thereof.
A plasma processing apparatus comprising:
- a process chamber in which a predetermined process is performed on a work;
- and
- a baffle plate which is provided inside said process chamber and traps a generated plasma in a predetermined area in said process chamber,
- said baffle plate being manufactured by:
- forming a photoresist film on a base member and patterning said photoresist film to have a plurality of openings;
- and
- forming a plurality of openings by etching said base member using said patterned photoresist film as an etching mask.
An insulating film forming system comprising:
- a thermal spray unit which thermal-sprays an insulating material toward a target;
- a heating unit which heats up the thermal-sprayed material adhered to said target;
- and
- a control unit which performs a first control operation that makes said thermal spray unit to thermal-spray the insulating material toward the target during a predetermined time period so that an insulating film with a predetermined thickness is formed on the target, then performs a second control operation that makes said heating unit to heat the insulating film on the target during a predetermined time period so that said insulating film is melted and then cooling down the melted insulating film so that the insulating film is hardened, and repeats the first and second control operations until the insulating film having a desired thickness is formed on the target.
An insulating film forming method comprising:
- thermal-spraying insulating material toward a target during a predetermined time period so that an insulating film with a predetermined thickness is formed on the target,
- heating the insulating film on the target during a predetermined time period so that said insulating film is melted and then cooling down the melted insulating film so that the insulating film is hardened.
A bellows, which is connected to, at one end, a bottom portion of a process chamber in which a predetermined process is performed on a work, and connected to, at another end, an electrode which is arranged in said process chamber and supports the work, maintains the vacuum state inside of said chamber thereby said predetermined process can be performed,
- said bellows being formed of high-purity aluminum, nickel, or alloy thereof.
A method of forming an insulating film comprising:
- performing thermal spray of an insulating material onto a conductive member which is connected to an electrode supporting a work and feeds high-frequency electric power to said electrode, and onto at least a part of a surface of said electrode onto which said conductive member is connected, to form a thermal-sprayed film;
- and
- annealing the thermal-splayed film every time the thermal-sprayed film with a predetermined thickness is formed.
A method of manufacturing a process chamber of a plasma processing apparatus wherein a predetermined process using a plasma is performed on a work, comprising:
- smoothing an inner surface of a cylindrical base member by mechanical working;
- etching out cracks formed on said inner surface of said base member, the crack being formed by said mechanical working;
- and
- forming an insulating film on said inner surface of said base member after said cracks have been etched out.
A method of manufacturing a baffle plate which is provided inside a process chamber of a plasma processing apparatus for generating a plasma, performing a predetermined process on a work in said process chamber with the generated plasma, and traps a generated plasma in a predetermined area in said process chamber, comprising:
- forming a photoresist film on a base member and patterning said photoresist film to have a plurality of openings;
- and
- forming a plurality of openings by etching said base member using said patterned photoresist film as an etching mask.
Dependencies are inferred from the claim text.