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US 2003/0140965 A1Published application
Vaporizer
AssigneeMKS Japan, Inc.
InventorsMayumi Arai, Yoshiyuki Yamazaki
Life of this patent
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Abstract
A vaporizer comprises disks each including an aperture at a central portion thereof. A hollow pipe having apertures for permitting radial outflow of a liquid extends through the aperture of each of the discs so as to form a stack of the discs. A resilient member applies a biasing force to the discs, and structure applies a force, via fluid control, against the biasing force to thereby remove the biasing force from the discs. Liquid in the hollow pipe is adapted to be delivered from the apertures to spaces between the discs and vaporized in the spaces between the discs.
Claims1
A vaporizer comprising:
- disks each including an aperture at a central portion thereof;
- a hollow pipe having apertures for permitting radial outflow of a liquid, with said hollow pipe extending through said aperture of each of said discs so as to form a stack of said discs;
- a resilient member for applying a biasing force to said discs;
- and
- structure for applying a force, via fluid control, against the biasing force to thereby remove the biasing force from said discs;
- wherein the liquid in said hollow pipe is adapted to be delivered from said apertures to spaces between said discs and vaporized in the spaces between said discs.
3 more elements
Dependencies are inferred from the claim text.