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US 2003/0140713 A1Published application
Six-axis force sensor
AssigneeHonda Giken Kogyo Kabushiki Kaisha
InventorsTakeshi Ohsato, Yusuke Hirabayashi
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AssigneeHonda Giken Kogyo Kabushiki Kaisha
InventorsTakeshi Ohsato, Yusuke Hirabayashi
Estimating the term…
A six-axis force sensor 1 consists of a sensor chip having a six-axis force sensor function formed using a semiconductor substrate 2 and film-forming technology. Connecting parts 5A to 5D are each made up of a high-rigidity bridge part and a low-rigidity elastic part. Semiconductor strain resistance devices Sya1-Sya3, Syb1-Syb3, Sxa1-Sxa3, and Sxb1-Sxb3 consisting of active layers are disposed on the front sides of the connecting parts. The elastic parts of the connecting parts absorb excess strains acting on the connecting parts and suppress the occurrence of strain spread over the whole semiconductor substrate. Because forces and moments of six specified axis components cause strains to occur selectively in corresponding strain resistance devices, by suitably combining measured results from selected resistance devices it is possible to effectively separate an applied external force into six components of force and moment and greatly suppress other axis interference in the measured results. As a results six components of force and moment of an external force can be measured with good reproducibility on the basis of the strains arising in the resistance devices disposed on the connecting parts.
A six-axis force sensor comprising a thin plate-shaped sensor chip formed using a substrate by semiconductor film-forming processes and having a six-axis force sensor function, the sensor chip comprising an action part to which an external force is applied, a support part to be fixed to an external structure, and a plurality of connecting parts each connecting together the action part and the support part and having a rigid bridge part joined to the action part and an elastic part joined to the support part, wherein each of the multiple connecting parts has a plurality of strain resistance devices each comprising an active layer formed on at least one of front and rear faces thereof in an area thereof where deformation strain effectively arises and each electrically connected to corresponding electrodes disposed in the support part.
A six-axis force sensor comprising:
Dependencies are inferred from the claim text.