Method and device for determining gas flow

Abstract

A gas flow determination method and a corresponding gas flow determination device are described. A sensor device (SD) having a diaphragm (D) and a frame (FR) enclosing it is provided; a predetermined temperature profile is created on the diaphragm (D); the gas flow to be determined is directed over the diaphragm (D) in a predetermined direction of flow (F); the change in the temperature profile caused by the gas flow is detected; and the gas flow is determined on the basis of the change thus detected. In particular, the temperature at a third location on the diaphragm (D) upstream from the first location and optionally at a fourth location downstream from the second location is regulated at a value corresponding to the local value of the predetermined temperature profile. In this way, the effect of soiling on the diaphragm (D) may be minimized effectively.

Dependencies are inferred from the claim text.