Micro-electromechanical actuators
AssigneeElectronics and Telecommunications Research Institute
InventorsJong Soo Ko, Dae Sik Lee, Myung Lae Lee, Chi Hoon Jun, Yun Tae Kim
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Abstract
The present invention relates to a micro-electromechanical actuator. An electromagnetic-type micro-electromechanical actuator of the present invention has a conductive beam formed in a micro electronic substrate on an upper side of a magnetic substance, so that the conductive beam can be moved toward an in-plane mode in parallel to the micro electronic substrate depending on a direction that current flows. Therefore, the micro-electromechanical actuator can be applied to most of electromagnetic micro-electromechanical systems that require an in-plane mode.
Claims18
A micro-electromechanical actuator, comprising:
- a micro electronic substrate having a surface;
- a magnetic substance formed at one side of said micro-electronic substrate;
- and
- a plurality of conductive beams formed on both sides of said microelectronic substrate,
- wherein said conductive beams are movable along a given path in parallel extended against an upper surface of said micro-electronic substrate by means of Lorentz force due to an electromagnetic force of said magnetic substance.
Dependencies are inferred from the claim text.