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US 2003/0132693 A1Published application
Microdischarge devices and arrays having tapered microcavities
AssigneeThe Board of Trustees of the University of Illinois
InventorsJ. Gary Eden, Sung-Jin Park, Jack Chen, Chang Liu
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Abstract
A microdischarge device has a semiconductor layer, an intermediate layer, and a conductive layer. A tapered cavity is disposed in at least the semiconductor layer.
Claims74
A microdischarge device, comprising:
- a first layer having a tapered cavity disposed therein;
- an intermediate layer on the first layer;
- and
- a second layer on the intermediate layer, the intermediate layer electrically insulating the first layer from the second layer, the first and second layers having a conductivity larger than that of the intermediate layer.
1 more element
A microdischarge device, comprising:
- a semiconductor layer having a tapered cavity disposed therein;
- an intermediate layer on the semiconductor layer;
- and
- a second layer on the intermediate layer, the intermediate layer electrically insulating the semiconductor layer from the second layer.
1 more element
A method of fabricating a microdischarge device comprising:
- forming a tapered cavity in semiconductor material, and forming a microdischarge device comprising the semiconductor material.
Dependencies are inferred from the claim text.