US 2003/0120449 A1Published application

Correction method of measurement errors, quality checking method for electronic components, and characteristic measuring system of electronic components

AssigneeMurata Manufacturing Co., Ltd.

InventorGaku Kamitani

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Abstract

Actual measured results, which do not agree with a reference measuring system accurately, are corrected to the same level as results measured by the reference measuring system. An interrelating formula between results measured by an actual measuring system and results measured by a reference measuring system is obtained after measuring electrical characteristics of a correction-data acquisition sample by the reference measuring system and the actual measuring system, respectively. Then, by substituting electrical characteristics of a target electronic component measured by the actual measuring system in the interrelating formula for computation, the electric characteristics of the target electronic component is corrected to electric characteristics assumed to be obtained by the reference measuring system.

Claims13

Dependent claims

A measurement-error correction method, in which after electrical characteristics of a target electronic component are measured by an actual measuring system with measured results that do not agree with a reference measuring system, the measured values are corrected to electrical characteristics assumed to be obtained by the reference measuring system, the measurement-error correction method comprising the steps of:

preparing a correction-data acquisition sample in advance, which generates the same electrical characteristics as arbitrary electrical characteristics of the target electronic component;
measuring electrical characteristics of the correction-data acquisition sample by the reference measuring system and the actual measuring system, respectively;
obtaining an interrelating formula between results measured by the reference measuring system and results measured by the actual measuring system;
and
correcting electrical characteristics of the target electronic component to electrical characteristics assumed to be obtained by the reference measuring system by substituting the electrical characteristics of the target electronic component measured by the actual measuring system in the interrelating formula for computation.

2 more elements

A measuring system for measuring electronic component characteristics comprising:

target electronic component measuring means for measuring electrical characteristics of a target electronic component;
storing means for storing electrical characteristics, which are measured by the reference measuring system, of a correction-data acquisition sample generating the same electrical characteristics as arbitrary electrical characteristics of the target electronic component;
interrelating formula computing means for computing an interrelating formula between the electrical characteristics of the correction-data acquisition sample, which are measured by the measuring means, and the electrical characteristics of the correction-data acquisition sample, which are measured by the reference measuring system and stored in the storing means;
and
correcting means for correcting the electrical characteristics of the target electronic component to electrical characteristics assumed to be obtained by the reference measuring system by substituting the electrical characteristics of the target electronic component measured by the measuring means in the interrelating formula for computation.

2 more elements

Dependencies are inferred from the claim text.