Fused silica containing aluminum
AssigneeCorning Incorporated
InventorDaniel R. Sempolinski
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Abstract
Fused silica articles exhibiting improved internal transmission and decreased absorption change when irradiated with a laser when compared with fused silica articles containing lower levels of aluminum. The articles also exhibit induced transmission when irradiated with a laser.
Claims12
A fused silica glass article resistant to optical damage in ultraviolet radiation in the wavelength range between 190 and 300 nm containing less than 3×1017 cm3 of hydrogen and having a minimum internal transmission greater than or equal to 99.75%/cm at a wavelength of 193 nm.
A fused silica glass article exhibiting an induced transmission of 0.023%/cm after irradiation with less than 25,000 pulses from an ArF laser at a fluence of 0.97 mj/cm2/pulse.
Dependencies are inferred from the claim text.