Manufacturing method and apparatus for magnetic head sliders
AssigneeFujitsu Limited
InventorsMichinao Nomura, Yoshiaki Yanagida, Tomokazu Sugiyama, Koji Sudo
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Abstract
Disclosed herein is a method including the steps of cutting a wafer to prepare a row block having a plurality of head elements arranged in a matrix, bonding a plate member to one side surface of the row block, bonding a row tool to another side surface of the row block bonded to the plate member opposite to the one side surface, and cutting the row block to prepare a row bar bonded to the row tool and having a row of the head elements. A bonding apparatus for realizing the above bonding steps is also disclosed.
Claims20
A method comprising the steps of:
- cutting a wafer to prepare a row block having a plurality of head elements arranged in a matrix;
- bonding a plate member to one side surface of said row block;
- bonding a row tool to another side surface of said row block bonded to said plate member opposite to said one side surface;
- and
- cutting said row block to prepare a row bar bonded to said row tool and having a row of said head elements.
An apparatus for bonding a row block having a plurality of head elements arranged in a matrix to a plate member, comprising:
- a carrier block having a positioning pin for positioning said row block;
- an adhesive applying assembly for applying an adhesive to one side surface of said plate member;
- a rinking assembly having a clamper for clamping said plate member mounted on said carrier block, a drive mechanism for reciprocating said clamper, and a first presser block for pressing said row block mounted on said carrier block against said one side surface of said plate member;
- and
- a bonding assembly having a positioning block for positioning said plate member and said row block mounted on said carrier block, a second presser block for pressing said row block against said one side surface of said plate member, and an air nozzle for spraying air to a bonding portion between said row block and said plate member.
An apparatus for bonding a row tool to a first side surface of a row block, a plate member being preliminarily bonded to a second side surface of said row block opposite to said first side surface, said apparatus comprising:
- a carrier block having a positioning pin for positioning said row block;
- a rail assembly having a first block for mounting said row tool and a second block for substantially vertically holding said row tool in cooperation with said first block;
- an adhesive applying assembly for applying an adhesive to one side surface of said row tool held in said rail assembly;
- a rinking assembly having a rinking base for mounting said carrier block, a clamper for clamping said row tool mounted on said carrier block, a drive mechanism for reciprocating said clamper, and a first presser block for pressing said row block mounted on said carrier block against said one side surface of said row tool;
- and
- a bonding assembly having a bonding base for mounting said carrier block, a positioning block for positioning said carrier block, said row block, and said row tool mounted on said carrier block, and a second presser block for pressing said row block against said one side surface of said row tool.
An apparatus for lapping a row bar having a plurality of head elements arranged in a row, comprising:
- a lap plate for providing a lapping surface;
- a row tool having a plurality of bend cells formed by a plurality of slits;
- a presser mechanism for pressing said row tool toward said lapping surface of said lap plate;
- and
- a compressed air source for supplying an air pressure to each of said bend cells.
A method of lapping a row bar having a plurality of head elements arranged in a row, comprising the steps of:
- providing a lapping surface by a lap plate;
- pressing said row bar bonded to a lower surface of a row tool having a plurality of bend cells formed by a plurality of slits, against said lapping surface;
- and
- applying individually adjustable air pressures to said bend cells, respectively;
- whereby said row bar is displaced at multiple points in lapping.
A row tool to which a row bar having a plurality of head elements arranged in a row is adapted to be bonded, comprising:
- a plurality of bend cells formed by a plurality of slits;
- a pair of fixed cells formed on the opposite sides of said bend cells, each of said fixed cells having a width larger than that of each of said bend cells;
- and
- a parallel spring mechanism.
A row tool assembly comprising:
- a row tool having an upper surface, a plurality of bend cells formed by a plurality of slits, a parallel spring mechanism, an insert hole extending horizontally, and a plurality of first holes communicating with said insert hole and opening to said upper surface;
- an air lead frame inserted in said insert hole of said row tool and having a plurality of air reservoirs respectively communicating with said first holes of said row tool;
- and
- an air plate fixed to said upper surface of said row tool and having a plurality of second holes respectively communicating with said first holes of said row tool.
Dependencies are inferred from the claim text.