US 2003/0119234 A1 · Method of filling a concave portion with an insulating material

Abstract

A method of manufacturing a semiconductor device comprises providing a substrate having a first insulating layer formed thereon. Then, a dummy layer is selectively formed on the first insulating layer. Therefore, a concave portion is formed to expose the first insulating layer. Next, a second insulating layer is selectively formed within the concave portion of the substrate. When the second insulating layer is formed, hexamethyidisilazane is used as a source gas and oxygen is used as an adjunction gas while the substrate is irradiated by vacuum ultraviolet light. By the formation of the second insulating layer, the dummy layer and the second insulating layer form an approximate flat surface.

Claims20

Dependent claims

A method of filling a concave portion comprising:

providing a substrate having a concave portion thereon;
providing the substrate in a chamber of an LPCVD apparatus;
and
introducing a hexamethyidisilazane gas and an oxygen gas to said chamber while irradiating vacuum ultraviolet light to the substrate so as to form an insulating layer in the concave portion of the substrate.

1 more element

Dependencies are inferred from the claim text.

Facts

Application

10/307,280Filed 2 Dec 2002

Priority

JP 163787/200131 May 2001

Published

26 Jun 2003

Term ends

Not estimatedThe source records don’t support an estimate.

Classification15 codes

H10P 14/6922
Containing silicon: the material containing Si, O and at least one of H, N, C, F or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
C23C 16/045
Coating on selected surface areas, e.g. using masks: coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
C23C 16/401
Oxides: containing silicon
C23C 16/482
By irradiation, e.g. photolysis, radiolysis, particle radiation: using incoherent light, UV to IR, e.g. lamps

Method of filling a concave portion with an insulating material

Life of this patent

Method of filling a concave portion with an insulating material

Life of this patent

Abstract

Claims20