Thermal treatment apparatus
AssigneeMatsushita Electric Industrial Co., Ltd.
InventorsYuji Tsutsui, Hiroyuki Naka
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Abstract
In a thermal treatment apparatus comprising a plurality of thermal treatment chambers in which an object to be treated is thermally treated while being transported, at least one pair of two adjacent thermal treatment chambers of which inside temperatures are different from each other are connected through a thermal insulating structural member, whereby thermal conduction between the chambers such as muffles is prevented to reduce a heat loss caused in the thermal treatment apparatus, and therefore, input thermal energy which is necessary to carry out a predetermined thermal treatment is significantly reduced without affecting quality and yield of the object.
Claims12
A thermal treatment apparatus comprising a plurality of thermal treatment chambers so as to apply a thermal treatment to an object to be treated that is transported through the thermal treatment chambers, wherein at least one pair of two adjacent thermal treatment chambers of which inside temperatures are different each other are connected through a thermal insulating structural member and the thermal insulating structural member has a tunnel structure so as to allow the object to be treated to pass therethrough.
Dependencies are inferred from the claim text.