Coated silica particles and method for production thereof
OwnerBozena Stanislawa Tokarz, Kenneth Olof Larssoninventors
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Abstract
The present invention relates to a method for preparing cerium oxide coated silica particles and cerium oxide silica particles obtainable by the method. The invention further relates to cerium oxide coated silica particles and the use thereof for polishing.
Claims13
Method of preparing coated silica particles comprising preparing a dispersed mixture of silica particles, at least one cerium containing precursor, and an oxidising agent, thereby oxidising said at least one cerium containing precursor to form cerium oxide coated silica particles with at least one cerium oxide on the silica particles.
Method of preparing cerium oxide coated silica particles which comprises mixing silica particles, at least one cerium containing precursor, and an oxidising agent.
Cerium oxide coated silica particles obtained by preparing a dispersed mixture of silica particles, at least one cerium containing precursor, and an oxidising agent.
Cerium oxide coated silica particles.
Dependencies are inferred from the claim text.