Membrane for capacitive vacuum measuring cell
AssigneeInficon GmbH
InventorPer Bjoerkman
Life of this patent
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Abstract
A ceramic membrane for a capacitive vacuum measuring cell includes a thin ceramic membrane with a thickness of <250 μm, in particular less than 120 μm. The membrane is produced from a ribbon-shaped green body of Al2O3, and is given high planarity by smoothing the membrane after sintering. The green body is sintered at a sintering temperature that is higher than the smoothing temperature applied following sintering.
Claims15
A membrane for a capacitive vacuum measuring cell, said membrane being made of a membrane material consisting of Al2O3 and having a thickness within the range of 1 μm to 250 μm.
A membrane for a capacitive vacuum measuring cell, said membrane being produced by the process of:
- a. forming the membrane from an Al2O3 slurry;
- b. heating the membrane a first time in a furnace at a first temperature to sinter the membrane;
- c. cooling the membrane following heating step b;
- d. heating the membrane a second time in a furnace at a second temperature to smooth the membrane, the second temperature being lower than the first temperature;
- and
- e. cooling the membrane following heating step d.
Dependencies are inferred from the claim text.