Photonic band gap structures with extrusion deposited layers
OwnerSeth A. Miller, Elisabeth Marley Koontzinventors
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Abstract
A method of fabricating a 3-D photonic band gap structure. The method can be applied to any such structure made using stacked layers of materials having alternating low and high refractive indices. At least one of these layers is deposited using extrusion coating, which eliminates the need for planarization, such as chemical mechanical polishing.
Claims19
A method of fabricating a 3-D photonic band gap (PBG) structure, comprising the steps of:
- depositing a first layer material;
- patterning the first layer material to form grid elements;
- depositing a second layer material, such that the second layer material fills gaps between the grid elements;
- depositing and patterning successive layers to form a lattice structure from alternating layers of the first layer material and the second layer material;
- wherein at least one of the depositing steps is performed by extrusion coating;
- and
- wherein the first layer material or the second layer material have different indices of refraction.
A 3-D photonic band gap (PBG) structure, comprising:
- alternating layers of a first material and a second material, patterned and etched to form a lattice-like structure;
- wherein at least one of the layers is an extrusion coating material;
- and
- wherein the first material and the second material have different indices of refraction.
In a method for fabricating a 3-D photonic band gap (PBG) structure having alternating layers of material having different indices of refraction, an improvement comprising:
- depositing one or more of the layers by means of extrusion coating.
Dependencies are inferred from the claim text.