Method of fabricating a coated process chamber component
AssigneeApplied Materials, Inc.
InventorsYongxiang He, Hong Wang, Clifford Stow
Life of this patent
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Abstract
A method of fabricating a process chamber component that has a ceramic form with grains and grain boundary regions. In the method, the component is bead blasted to provide a surface having a relatively low roughness average of less than about 150 microinches. The component is dipped into a solution having a concentration that is sufficiently low to reduce etching of grain boundary regions of the ceramic form. A metal coating is formed over at least a portion of the ceramic form. The component fabricated by this method can tolerate thicker deposits of sputtered material in a sputtering process without the sputtered deposit accumulates causing spalling of the coating of the component.
Claims16
A method of fabricating a component for a process chamber, the component comprising a ceramic form having grains and grain boundary regions, and the method comprising:
- (a) bead blasting the component to provide a surface having a roughness average of less than about 150 microinches;
- (b) dipping the component into an solution having a concentration of acid or base that is sufficiently low to reduce etching of grain boundary regions of the ceramic form;
- and
- (c) forming a metal coating over at least a portion of the ceramic form.
A method of fabricating a component for a process chamber, the component comprising a ceramic form having aluminum oxide grains and grain boundary regions, and the method comprising:
- (a) bead blasting the component to provide a surface roughness having a roughness average of less than about 150 microinches;
- (b) dipping the component into a solution comprising one or more of HF, HCl, and HNO3, in a concentration of less than about 10 volume percent;
- and
- (c) forming an aluminum coating over at least a portion of the component by a twin-wire thermal spraying process.
A method of forming a component for a process chamber, the component comprising a ceramic form having aluminum oxide grains and grain boundary regions, and the method comprising:
- (a) bead blasting the component to provide a surface roughness having a roughness average of less than about 150 microinches;
- (b) dipping the component into a solution comprising less than about 20 volume percent of one or more of KOH or diethylene glycol monobutyl ether;
- and
- (c) forming an aluminum coating over at least a portion of the ceramic form by a twin wire thermal spraying process.
Dependencies are inferred from the claim text.