Variable width waveguide for mode-matching and method for making
AssigneeShipley Company, L.L.C.
InventorsDan A. Steinberg, Neal Ricks, Mindaugas F. Dautartas, Hui Luo
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Abstract
A variable width waveguide useful for mode matching between dissimilar optical waveguides and optical fibers and a method for making the same is described. In one embodiment, a tapered waveguide is etched in a substrate, a cladding material is laid over the upper surface of the substrate and within the waveguide, and the waveguide is then filled with a core material. The core material may be deposited in a single step, or in successive deposition steps.
Claims38
An optical waveguide, comprising:
- a substrate having an upper surface and a trench extending therethrough, wherein said trench has a varying profile along its length;
- a core material in said trench;
- and
- a cladding material in said trench between said substrate and said core material.
An integrated optic chip, comprising:
- a substrate having an upper surface;
- a waveguide including:
- a trench extending through said substrate, said trench having a varying profile along at least a part of its length;
- a core material in said trench;
- and
- a cladding material in said trench between said substrate and said core material;
- and
- integrated optical circuits optically coupled to said waveguide.
A method for forming an optical waveguide, said method comprising:
- forming a trench through a substrate having an upper surface, wherein the trench has a varying profile along its length;
- locating a cladding material in the trench;
- depositing a core material on the cladding material in the trench;
- and
- planarizing the substrate to the upper surface.
A method for forming an optical waveguide, said method comprising:
- forming a trench through a glass substrate having an upper surface, wherein the trench has a varying profile along its length;
- depositing a core material in the trench;
- and
- planarizing the substrate to the upper surface.
An optical device, comprising:
- an optical fiber;
- and
- an integrated optic chip including a tapered waveguide coupled to said optical fiber and an integrated waveguide portion coupled with said tapered waveguide, wherein said integrated waveguide portion has a core with a higher n than said optical fiber.
Dependencies are inferred from the claim text.