Digital optical switch apparatus and process for manufacturing same

A micro-machined device for controllably directing a beam of light, the device comprising:

• a) a mirror coupled to a support structure by a pair of single-gimbaled dual-axis hinges for providing rotational movement of the mass about first and second axes of rotation;
• b) a top cap bonded to the mirror support structure and having therein a window to allow light to reach the mirror;
• c) a bottom cap bonded to the mirror support structure;
• d) a plurality of electrodes disposed on at least one of the top cap and the bottom cap, the electrodes when energized with electrical energy provide a selectable force to the mirror for moving the mirror in a plurality of angular directions, the mirror including one or more portions contacting at least one of the top cap and the bottom cap during angular movement to stop movement of the mirror such that the mirror position is one of a plurality of discrete predetermined angular positions.

A micro-machined device for controllably directing a beam of light, the device comprising a plurality of mirror assemblies, each mirror assembly comprising:

• a) a mirror coupled to a support structure by a pair of single-gimbaled dual-axis hinges for providing rotational movement of the mass about first and second axes of rotation;
• b) a top cap bonded to the mirror support structure and having therein a window to allow light to reach the mirror;
• c) a bottom cap bonded to the mirror support structure;
• and
• d) a plurality of electrodes disposed on at least one of the top cap and the bottom cap, the electrodes when energized with electrical energy provide a selectable force to the mirror for moving the mirror in a plurality of angular directions, the mirror including one or more portions contacting at least one of the top cap and the bottom cap during angular movement to stop movement of the mirror such that the mirror position is one of a plurality of discrete predetermined angular positions,
• wherein light exiting a first mirror assembly is directed to enter a second mirror assembly.

A planar fabrication method for creating a multi-tiered micro-machined device having at least three tiers, the method comprising:

• a) fabricating a first wafer tier having one or more electrically conductive first leads responsive to electrical energy applied to the first leads;
• b) fabricating a second wafer tier having one or more electrically conductive second leads responsive to electrical energy applied to the second leads;
• c) fabricating a middle wafer tier including a first electrically conductive portion and a second electrically conductive portion;
• d) coupling the middle wafer tier between the first wafer tier and the second wafer tier such that the first conductive portion makes contact with the second leads when the middle wafer the first wafer and the second wafer are coupled.

A planar fabrication method for creating a multi-tiered micro-machined device, the method comprising:

• a) providing a first substrate;
• b) applying a first insulating layer to the first substrate;
• c) patterning the first insulating layer to expose portions of the first substrate;
• d) applying a second insulating layer to a second substrate;
• e) patterning the second insulating layer to expose portions of the second substrate;
• f) coupling the second substrate to the first substrate such that the first insulating layer is coupled to the second insulating layer;
• g) etching selected portions of the second substrate to expose the patterned second insulating layer and portions of the first insulating layer, wherein the exposed portions of the second insulating layer serve as in-situ masks to shield areas covered by the mask;
• h) depositing a material substantially uniformly on exposed surfaces from generally one direction such that areas shielded by the masks receive substantially no material deposited thereon.