Sensor for a contact-free temperature measurement
AssigneePerkinelmer Optoelectronics GmbH & Co. KG
InventorsJorg Schieferdecker, Martin Hausner, Wilhelm Leneke, Marion Simon
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Abstract
A sensor for measuring a temperature by means of a heat-sensitive area applied onto and/or underneath a membrane, the membrane being arranged above a recess. The recess is etched by a reactive ion etching method such that it is fully defined laterally by side walls arranged at an angle between 80° and 100° relative to the membrane, adjoining side walls being arranged at an angle of at least 40° relative to one another.
Claims31
A sensor for measuring a temperature by means of a heat-sensitive area applied onto and/or underneath a membrane, the membrane being arranged above a recess fully defined laterally by side walls,
- at least one side wall being arranged at an angle between 80° and 100° relative to the membrane.
A sensor for measuring a temperature by means of a heat-sensitive area applied onto and/or underneath a membrane, the membrane being arranged above a recess, wherein the recess is etched by a reactive ion etching method.
A process for producing a sensor for temperature measurement, comprising
- providing a membrane applied to a support, and
- etching a recess into the support underneath the membrane using a reactive ion etching method.
A process for producing a sensor for temperature measurement, comprising,
- in an activation phase etching a recess having side walls into a support by means of a reactive ion etching method,
- in a passivation phase, depositing a protective layer, in particular a polymer layer, on the side walls, which protective layer prevents or markedly reduces removal of material from the side walls, and
- alternating additional activation phases and passivation phases, the passivation phases being moderated and/or reduced, and/or the activation phases being intensified and/or extended.
Dependencies are inferred from the claim text.